Reduction of ion energies from a multicomponent Z-pinch plasma

IEEE Transactions on Plasma Science

Volumn 35, Issue 3, 2007, Pages 606-613

  Ruzic, David N ^a   Thompson, Keith C ^a   Jurczyk, Brian E ^a   Antonsen, Erik L ^a   Srivastava, Shailendra N ^a   Spencer, Josh B ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

EUV lithography; Ion acceleration; Multi component plasma; Z pinch plasma

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY; HEAVY IONS; PINCH EFFECT; SURFACE ROUGHNESS; XENON;

ION ACCELERATION; MULTI-COMPONENT PLASMA; Z-PINCH PLASMA;

PLASMAS;

EID: 34347395743     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.896983     Document Type: Article

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