Probe measurements of electron-energy distributions in plasmas: What can we measure and how can we achieve reliable results?

Journal of Physics D: Applied Physics

Volumn 44, Issue 23, 2011, Pages

  Godyak, V A ^a   Demidov, V I ^b  

^a RF Plasma Consulting   (United States)

^b WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC PLASMAS; CIRCUIT RESISTANCE; ION CURRENTS; ISOTROPIC PLASMA; POTENTIAL VALUES; PROBE CONSTRUCTION; PROBE DESIGN; PROBE MEASUREMENTS;

CIRCUIT OSCILLATIONS; DISTRIBUTION FUNCTIONS; ELECTRIC RESISTANCE; MAGNETIC FIELDS; MEASUREMENT ERRORS; PLASMA OSCILLATIONS;

PROBES;

EID: 79957692235     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/23/233001     Document Type: Review

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