Plasma processes at atmospheric and low pressures

Vacuum

Volumn 83, Issue 3, 2008, Pages 522-527

  Bárdos, Ladislav ^a,b   Baránková, Hana ^a,b  

^a UPPSALA UNIVERSITY   (Sweden)

^b BB Plasma Design AB   (Sweden)

Author keywords

Atmospheric plasma sources; Cold atmospheric plasma; Dielectric barrier discharge; Fused hollow cathode; Hybrid plasma; Low pressure plasma; Paschen curve; Surface activation

Indexed keywords

ATMOSPHERIC PRESSURE; ATMOSPHERICS; PLASMA DEVICES;

ATMOSPHERIC PLASMA SOURCES; ATMOSPHERIC PLASMAS; COLD ATMOSPHERIC PLASMA; DIELECTRIC BARRIER DISCHARGE; EQUIPMENT COSTS; FUSED HOLLOW CATHODE; HYBRID PLASMA; LOW PRESSURES; LOW-PRESSURE PLASMA; NON-EQUILIBRIUM; PASCHEN CURVE; PLASMA PROCESSING; PLASMA SURFACING; PROCESSING CONDITIONS; PUMPING SYSTEMS; REDUCED PRESSURE; SURFACE ACTIVATION;

PLASMAS;

EID: 52949095722     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.063     Document Type: Article

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