Controlled growth of silicon nanocrystals in a plasma reactor

Physical Review Letters

Volumn 95, Issue 16, 2005, Pages

  Vach, Holger ^a   Brulin, Quentin ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC HYDROGEN; PLASMA REACTORS; SILICON NANOCRYSTALS; SILICON NANOWIRES;

BIOREACTORS; CRYSTALLINE MATERIALS; HYDROGEN; SEMICONDUCTOR GROWTH; SILICON;

NANOSTRUCTURED MATERIALS;

EID: 28844457710     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.95.165502     Document Type: Article

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