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Volumn 42, Issue 19, 2009, Pages

Plasma modelling and numerical simulation

Author keywords

[No Author keywords available]

Indexed keywords

19TH CENTURY; 20TH CENTURY; DYNAMICAL THEORY; MODELLING AND SIMULATIONS; NUMERICAL SIMULATION; PLASMA MODEL; PLASMA-BASED TECHNOLOGY; STATE OF THE ART;

EID: 70350680332     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/19/190301     Document Type: Review
Times cited : (134)

References (184)
  • 2
    • 0037459323 scopus 로고    scopus 로고
    • Plasma display panels: Physics, recent developments and key issues
    • Boeuf J P 2003 Plasma display panels: physics, recent developments and key issues J. Phys. D: Appl. Phys. 36 R53-79
    • (2003) J. Phys. D: Appl. Phys. , vol.36 , Issue.6
    • Boeuf, J.P.1
  • 4
    • 32944456583 scopus 로고    scopus 로고
    • Penetration of a dielectric barrier discharge plasma into textile structures at medium pressure
    • DOI 10.1088/0963-0252/15/1/012, PII S0963025206069192
    • De Geyter N, Morent R and Leys C 2006 Penetration of a dielectric barrier discharge plasma into textile structures at medium pressure Plasma Sources Sci. Technol. 15 78-84 (Pubitemid 43256524)
    • (2006) Plasma Sources Science and Technology , vol.15 , Issue.1 , pp. 78-84
    • De Geyter, N.1    Morent, R.2    Leys, C.3
  • 7
    • 0000937792 scopus 로고
    • Behavior of ar plasmas formed in a mirror field electron cyclotron resonance microwave ion source
    • Gorbatkin S M, Berry L A and Roberto J B 1990 Behavior of ar plasmas formed in a mirror field electron cyclotron resonance microwave ion source J. Vac. Sci. Technol. A: Vac. Surf. Films 8 2893-9
    • (1990) J. Vac. Sci. Technol. A: Vac. Surf. Films , vol.8 , Issue.3 , pp. 2893-2899
    • Gorbatkin, S.M.1    Berry, L.A.2    Roberto, J.B.3
  • 8
    • 0003232773 scopus 로고
    • Neutral gas temperatures in a multipolar electron cyclotron resonance plasma
    • Hopwood J and Asmussen J 1991 Neutral gas temperatures in a multipolar electron cyclotron resonance plasma Appl. Phys. Lett. 58 2473-5
    • (1991) Appl. Phys. Lett. , vol.58 , Issue.22 , pp. 2473-2475
    • Hopwood, J.1    Asmussen, J.2
  • 12
    • 70350632617 scopus 로고    scopus 로고
    • Hybrid modeling of low temperature plasmas for fundamental investigations and equipment design
    • (this issue)
    • Kushner M J 2009 Hybrid modeling of low temperature plasmas for fundamental investigations and equipment design J. Phys. D: Appl. Phys. 42 194013 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194013
    • Kushner, M.J.1
  • 13
    • 70350682134 scopus 로고    scopus 로고
    • see: http://uigelz.eecs.umich.edu/
  • 15
    • 70350700155 scopus 로고    scopus 로고
    • see: http://plasimo.phys.tue.nl/
  • 16
    • 33746917199 scopus 로고    scopus 로고
    • Finite element analysis of an atmospheric pressure RF-excited plasma needle
    • DOI 10.1088/0022-3727/39/16/S01, PII S0022372706165079, S01
    • Sakiyama Y and Graves D B 2006 Finite element analysis of an atmospheric pressure rf-excited plasma needle J. Phys. D: Appl. Phys. 39 3451-6 (Pubitemid 44192006)
    • (2006) Journal of Physics D: Applied Physics , vol.39 , Issue.16 , pp. 3451-3456
    • Sakiyama, Y.1    Graves, D.B.2
  • 17
    • 33746905945 scopus 로고    scopus 로고
    • Corona-glow transition in the atmospheric pressure RF-excited plasma needle
    • DOI 10.1088/0022-3727/39/16/018, PII S0022372706225993, 018
    • Sakiyama Y and Graves D B 2006 Corona-glow transition in the atmospheric pressure rf-excited plasma needle J. Phys. D: Appl. Phys. 39 3644-52 (Pubitemid 44191994)
    • (2006) Journal of Physics D: Applied Physics , vol.39 , Issue.16 , pp. 3644-3652
    • Sakiyama, Y.1    Graves, D.B.2
  • 18
    • 34247194234 scopus 로고    scopus 로고
    • Nonthermal atmospheric rf plasma in one-dimensional spherical coordinates: Asymmetric sheath structure and the discharge mechanism
    • Sakiyama Y and Graves D B 2007 Nonthermal atmospheric rf plasma in one-dimensional spherical coordinates: Asymmetric sheath structure and the discharge mechanism J. Appl. Phys. 101 073306
    • (2007) J. Appl. Phys. , vol.101 , Issue.7 , pp. 073306
    • Sakiyama, Y.1    Graves, D.B.2
  • 19
    • 42549151886 scopus 로고    scopus 로고
    • Influence of electrical properties of treated surface on rf-excited plasma needle at atmospheric pressure
    • Sakiyama Y, Graves D B and Stoffels E 2008 Influence of electrical properties of treated surface on rf-excited plasma needle at atmospheric pressure J. Phys. D: Appl. Phys. 41 095204
    • (2008) J. Phys. D: Appl. Phys. , vol.41 , Issue.9 , pp. 095204
    • Sakiyama, Y.1    Graves, D.B.2    Stoffels, E.3
  • 20
    • 67649880234 scopus 로고    scopus 로고
    • Neutral gas flow and ring-shaped emission profile in non-thermal rf-excited plasma needle discharge at atmospheric pressure
    • Sakiyama Y and Graves D B 2009 Neutral gas flow and ring-shaped emission profile in non-thermal rf-excited plasma needle discharge at atmospheric pressure Plasma Sources Sci. Technol. 18 025022
    • (2009) Plasma Sources Sci. Technol. , vol.18 , Issue.2 , pp. 025022
    • Sakiyama, Y.1    Graves, D.B.2
  • 21
    • 0000991997 scopus 로고
    • A dynamical theory of the electromagnetic field
    • Maxwell J C 1865 A dynamical theory of the electromagnetic field Phil. Trans. R. Soc. Lond. 155 459-512
    • (1865) Phil. Trans. R. Soc. Lond. , vol.155 , Issue.1 , pp. 459-512
    • Maxwell, J.C.1
  • 22
    • 0001489148 scopus 로고
    • Mémoire sur les lois du mouvement des fluides
    • Navier C-L 1822 Mémoire sur les lois du mouvement des fluides Mém. Acad. Sci. 6 389
    • (1822) Mém. Acad. Sci. , vol.6 , pp. 389
    • Navier, C.-L.1
  • 23
    • 0000119455 scopus 로고
    • On the theories of the internal friction of fluids in motion
    • Stokes G G 1845 On the theories of the internal friction of fluids in motion Camb. Trans. 8 287
    • (1845) Camb. Trans. , vol.8 , pp. 287
    • Stokes, G.G.1
  • 25
    • 0000194255 scopus 로고
    • Mémoire sur la puissance motrice de la chaleur
    • Imile Clapeyron 1834 Mémoire sur la puissance motrice de la chaleur J. Icole Polytech. 14 153-90
    • (1834) J. Icole Polytech. , vol.14 , pp. 153-190
    • Clapeyron, I.1
  • 27
    • 70350697938 scopus 로고
    • English translation of studies concerning affinity
    • Abrash H I 1986 English translation of studies concerning affinity J. Chem. Ed. 63 1044-7
    • (1986) J. Chem. Ed. , vol.63 , pp. 1044-1047
    • Abrash, H.I.1
  • 36
    • 70350700152 scopus 로고
    • The diffusion of ions into gases
    • Townsend J S 1899 The diffusion of ions into gases R. Soc. Proc. 65 192-6
    • (1899) R. Soc. Proc. , vol.65 , Issue.1 , pp. 192-196
    • Townsend, J.S.1
  • 38
    • 0000229982 scopus 로고
    • Weitere studien über das wärmegleichgewicht unter Gasmolekülen
    • Boltzmann L 1872 Weitere studien über das wärmegleichgewicht unter Gasmolekülen Sit. Akad. Wiss. (Wiener Berichte) 66 275-370
    • (1872) Sit. Akad. Wiss. (Wiener Berichte) , vol.66 , pp. 275-370
    • Boltzmann, L.1
  • 41
    • 84916389355 scopus 로고
    • Large-signal analysis of a silicon read diode oscillator
    • Scharfetter D L and Gummel H K 1969 Large-signal analysis of a silicon read diode oscillator IEEE Trans. Electron Devices 16 64-77
    • (1969) IEEE Trans. Electron Devices , vol.16 , Issue.1 , pp. 64-77
    • Scharfetter, D.L.1    Gummel, H.K.2
  • 45
    • 0005372845 scopus 로고
    • Oscillations in ionized gases
    • Langmuir I 1928 Oscillations in ionized gases Proc. Natl Acad. Sci. USA 14 627-37
    • (1928) Proc. Natl Acad. Sci. USA , vol.14 , Issue.8 , pp. 627-637
    • Langmuir, I.1
  • 46
    • 70350668935 scopus 로고
    • The charges on positive and negative ions in gases
    • Townsend J S 1908 The charges on positive and negative ions in gases R. Soc. Proc. A 80 207-11
    • (1908) R. Soc. Proc. , vol.80 , Issue.537 , pp. 207-211
    • Townsend, J.S.1
  • 47
    • 70350700153 scopus 로고
    • The charges on ions in gases, and the effect of water vapour on the motion of negative ions
    • Townsend J S 1908 The charges on ions in gases, and the effect of water vapour on the motion of negative ions R. Soc. Proc. A 81 464-71
    • (1908) R. Soc. Proc. , vol.81 , Issue.550 , pp. 464-471
    • Townsend, J.S.1
  • 48
    • 33746370268 scopus 로고
    • The motion of electrons in gases
    • Townsend J S and Tizard H T 1913 The motion of electrons in gases R. Soc. Proc. A 88 336-47
    • (1913) R. Soc. Proc. , vol.88 , Issue.604 , pp. 336-347
    • Townsend, J.S.1    Tizard, H.T.2
  • 49
    • 33748100508 scopus 로고
    • The abnormal kinetic energy of an ion in a gas
    • Pidduck F B 1913 The abnormal kinetic energy of an ion in a gas R. Soc. Proc. A 88 296-302
    • (1913) R. Soc. Proc. , vol.88 , Issue.603 , pp. 296-302
    • Pidduck, F.B.1
  • 50
    • 36149020188 scopus 로고
    • The kinetic theory of the motion of ions in gases
    • Pidduck F B 1938 The kinetic theory of the motion of ions in gases Phys. Rev. 53 197
    • (1938) Phys. Rev. , vol.53 , Issue.2 , pp. 197
    • Pidduck, F.B.1
  • 51
    • 34250909847 scopus 로고
    • Die Theorien von G. Hertz über die Bewegungen langsamer Elektronen in Gasen
    • Bailey V A 1931 Die Theorien von G. Hertz über die Bewegungen langsamer Elektronen in Gasen Z. F. Phys. 68 834-42
    • (1931) Z. F. Phys. , vol.68 , Issue.11-12 , pp. 834-842
    • Bailey, V.A.1
  • 52
    • 2542616305 scopus 로고
    • Ber die diffusion langsamer elektronen im elektrischen felde
    • Hertz G 1925 ber die diffusion langsamer elektronen im elektrischen felde Z. F. Phys. 32 298-306
    • (1925) Z. F. Phys. , vol.32 , Issue.1 , pp. 298-306
    • Hertz, G.1
  • 53
    • 34250913186 scopus 로고
    • Entwicklung der grundlagen einer strengen theorie für die diffusion von elektronen durch Gase
    • Bartels H 1929 Entwicklung der grundlagen einer strengen theorie für die diffusion von elektronen durch Gase Z. F. Phys. 55 507-32
    • (1929) Z. F. Phys. , vol.55 , Issue.7-8 , pp. 507-532
    • Bartels, H.1
  • 55
    • 0042103164 scopus 로고
    • Bemerkungen zu zwei früheren Arbeiten über die Elektronendiffusion
    • Druyvesteyn M J 1934 Bemerkungen zu zwei früheren Arbeiten über die Elektronendiffusion Physica 1 1003-6
    • (1934) Physica , vol.1 , Issue.7-12 , pp. 1003-1006
    • Druyvesteyn, M.J.1
  • 56
    • 33845400616 scopus 로고
    • The mechanism of electrical discharges in gases of low pressure
    • Druyvesteyn M J and Penning F M 1940 The mechanism of electrical discharges in gases of low pressure Rev. Mod. Phys. 12 87 (The editor of that journal notes that the authors did not have a chance to read proof in view of the 'troubled conditions in Holland This turned out to be quite an understatement; a list of errata was published one year later, see reference [56])
    • (1940) Rev. Mod. Phys. , vol.12 , Issue.2 , pp. 87
    • Druyvesteyn, M.J.1    Penning, F.M.2
  • 57
    • 36149003912 scopus 로고
    • Mechanism of electrical discharges in gases of low pressure
    • Druyvesteyn M J and Penning F M 1941 Mechanism of electrical discharges in gases of low pressure Rev. Mod. Phys. 13 72-3 (erratum)
    • (1941) Rev. Mod. Phys. , vol.13 , Issue.1 , pp. 72-73
    • Druyvesteyn, M.J.1    Penning, F.M.2
  • 60
    • 0342620796 scopus 로고
    • Calculation of Townsend's α for Ne
    • Druyvesteyn M J 1936 Calculation of Townsend's α for Ne Physica 3 65-74
    • (1936) Physica , vol.3 , Issue.1-4 , pp. 65-74
    • Druyvesteyn, M.J.1
  • 61
    • 34247338611 scopus 로고
    • Berechnung der geschwindigkeitsverteilung der elektronen bei gasentladungen in helium
    • Smit J A 1936 Berechnung der geschwindigkeitsverteilung der elektronen bei gasentladungen in helium Physica 3 543-60
    • (1936) Physica , vol.3 , Issue.6 , pp. 543-560
    • Smit, J.A.1
  • 62
    • 0000864199 scopus 로고
    • Velocity distributions for elastically colliding electrons
    • Morse P M, Allis W P and Lamar E S 1935 Velocity distributions for elastically colliding electrons Phys. Rev. 48 412-9
    • (1935) Phys. Rev. , vol.48 , Issue.5 , pp. 412-419
    • Morse, P.M.1    Allis, W.P.2    Lamar, E.S.3
  • 63
    • 0001457843 scopus 로고
    • The motion of electrons in metallic bodies
    • Lorentz H A 1905 The motion of electrons in metallic bodies Proc. Amsterdam Acad. 7 438-53
    • (1905) Proc. Amsterdam Acad. , vol.7 , pp. 438-453
    • Lorentz, H.A.1
  • 64
    • 84985801094 scopus 로고
    • Motion of electrons and ions in a weakly ionized gas in a field: I. Foundations of the integral theory
    • Braglia G L 1980 Motion of electrons and ions in a weakly ionized gas in a field: I. Foundations of the integral theory Beitr. Plasmaphys. 20 147-94
    • (1980) Beitr. Plasmaphys. , vol.20 , Issue.3 , pp. 147-194
    • Braglia, G.L.1
  • 66
    • 33748108402 scopus 로고
    • Theory of the townsend method of measuring electron diffusion and mobility
    • Allis W P and Allen H W 1937 Theory of the townsend method of measuring electron diffusion and mobility Phys. Rev. 52 703-7
    • (1937) Phys. Rev. , vol.52 , Issue.7 , pp. 703-707
    • Allis, W.P.1    Allen, H.W.2
  • 67
    • 36149005913 scopus 로고
    • Electron temperatures and mobilities in the rare gases
    • Allen H W 1937 Electron temperatures and mobilities in the rare gases Phys. Rev. 52 707-10
    • (1937) Phys. Rev. , vol.52 , Issue.7 , pp. 707-710
    • Allen, H.W.1
  • 69
    • 0039762528 scopus 로고
    • The motion of electrons in argon and in hydrogen
    • Townsend J S and Bailey V A 1922 The motion of electrons in argon and in hydrogen Phil. Mag. 44 1033
    • (1922) Phil. Mag. , vol.44 , pp. 1033
    • Townsend, J.S.1    Bailey, V.A.2
  • 72
    • 0006751333 scopus 로고
    • Plasma electron drift in a magnetic field with a velocity distribution function
    • Tonks L and Allis W P 1937 Plasma electron drift in a magnetic field with a velocity distribution function Phys. Rev. 52 710-13
    • (1937) Phys. Rev. , vol.52 , Issue.7 , pp. 710-713
    • Tonks, L.1    Allis, W.P.2
  • 73
    • 0001948871 scopus 로고
    • Theory of magnetic effects in the plasma of an arc
    • Tonks L 1939 Theory of magnetic effects in the plasma of an arc Phys. Rev. 56 360-73
    • (1939) Phys. Rev. , vol.56 , Issue.4 , pp. 360-373
    • Tonks, L.1
  • 74
    • 36149018181 scopus 로고
    • Energy distribution of electrons in high frequency gas discharges
    • Holstein T 1946 Energy distribution of electrons in high frequency gas discharges Phys. Rev. 70 367-84
    • (1946) Phys. Rev. , vol.70 , Issue.5-6 , pp. 367-384
    • Holstein, T.1
  • 75
    • 36149021398 scopus 로고
    • Energy distribution, drift velocity, and temperature of slow electrons in helium and argon
    • Barbiere D 1951 Energy distribution, drift velocity, and temperature of slow electrons in helium and argon Phys. Rev. 84 653-8
    • (1951) Phys. Rev. , vol.84 , Issue.4 , pp. 653-658
    • Barbiere, D.1
  • 76
    • 37049207721 scopus 로고
    • Discharge through gases
    • Loeb L B 1947 Discharge through gases Science (New Series) 106 229-36
    • (1947) Science (New Series) , vol.106 , pp. 229-236
    • Loeb, L.B.1
  • 78
    • 36149017514 scopus 로고
    • 2 from transport coefficients
    • 2 from transport coefficients Phys. Rev. 127 1621-33
    • (1962) Phys. Rev. , vol.127 , Issue.5 , pp. 1621-1633
    • Frost, L.S.1    Phelps, A.V.2
  • 79
    • 33847072441 scopus 로고
    • Momentum-transfer cross sections for slow electrons in he, ar, kr, and xe from transport coefficients
    • Frost L S and Phelps A V 1964 Momentum-transfer cross sections for slow electrons in he, ar, kr, and xe from transport coefficients Phys. Rev. 136 A1538-45
    • (1964) Phys. Rev. , vol.136
    • Frost, L.S.1    Phelps, A.V.2
  • 80
    • 0000031945 scopus 로고
    • Elastic and inelastic collision cross sections in hydrogen and deuterium from transport coefficients
    • Engelhardt A G and Phelps A V 1963 Elastic and inelastic collision cross sections in hydrogen and deuterium from transport coefficients Phys. Rev. 131 2115-28
    • (1963) Phys. Rev. , vol.131 , Issue.5 , pp. 2115-2128
    • Engelhardt, A.G.1    Phelps, A.V.2
  • 81
    • 36049055402 scopus 로고
    • Theory of electron diffusion parallel to electric fields: I. Theory
    • Parker J H and Lowke J J 1969 Theory of electron diffusion parallel to electric fields: I. Theory Phys. Rev. 181 290-301
    • (1969) Phys. Rev. , vol.181 , Issue.1 , pp. 290-301
    • Parker, J.H.1    Lowke, J.J.2
  • 82
    • 0014524283 scopus 로고
    • Longitudinal diffusion of electrons in electrostatic fields in gases
    • Skullerud H R 1969 Longitudinal diffusion of electrons in electrostatic fields in gases J. Phys. B: Atom. Mol. Phys. 2 696-705
    • (1969) J. Phys. B: Atom. Mol. Phys. , vol.2 , Issue.6 , pp. 696-705
    • Skullerud, H.R.1
  • 83
    • 70350700149 scopus 로고
    • Zur Auswirkung inelastischer stöße auf die elektronen-transportkoeffizienten in gasen und plasmen niedrigen ionisationsgrades
    • Wilhelm J and Winkler R 1967 Zur Auswirkung inelastischer stöße auf die elektronen-transportkoeffizienten in gasen und plasmen niedrigen ionisationsgrades Ann. Phys. Lpz. 475 296-302
    • (1967) Ann. Phys. Lpz. , vol.475 , Issue.5-6 , pp. 296-302
    • Wilhelm, J.1    Winkler, R.2
  • 84
    • 84987402455 scopus 로고
    • Die geschwindigkeitsverteilungsfunktion der elektronen im homogenen stationären LORENTZ-plasma in neon bei korrekter beschreibung unelastischer Stoßprozesse
    • Winkler R and Wilhelm J 1969 Die geschwindigkeitsverteilungsfunktion der elektronen im homogenen stationären LORENTZ-plasma in neon bei korrekter beschreibung unelastischer Stoßprozesse Ann. Phys. Lpz. 479 163-71
    • (1969) Ann. Phys. Lpz. , vol.479 , Issue.3-4 , pp. 163-171
    • Winkler, R.1    Wilhelm, J.2
  • 85
    • 84926861501 scopus 로고
    • Die berücksichtigung der ionisation durch elektronenstoß in der Elektronenkinetik des schwachionisierten anisothermen Plasmas: I. Analyse des ionisierungsstoßintegrals und ableitung von geeigneten darstellungen für eine numerische Behandlung
    • Wilhelm J and Winkler R 1979 Die berücksichtigung der ionisation durch elektronenstoß in der Elektronenkinetik des schwachionisierten anisothermen Plasmas: I. Analyse des ionisierungsstoßintegrals und ableitung von geeigneten darstellungen für eine numerische Behandlung Ann. Phys. Lpz. 491 333-51
    • (1979) Ann. Phys. Lpz. , vol.491 , Issue.5 , pp. 333-351
    • Wilhelm, J.1    Winkler, R.2
  • 86
    • 84981915758 scopus 로고
    • Die berücksichtigung der ionisation durch elektronenstoß in der elektronenkinetik des schwachionisierten anisothermen Plasmas: II. Anwendung auf das stationäre Plasma
    • Wilhelm J and Winkler R 1979 Die berücksichtigung der ionisation durch elektronenstoß in der elektronenkinetik des schwachionisierten anisothermen Plasmas: II. Anwendung auf das stationäre Plasma Ann. Phys. Lpz. 491 352-76
    • (1979) Ann. Phys. Lpz. , vol.491 , Issue.5 , pp. 352-376
    • Wilhelm, J.1    Winkler, R.2
  • 87
    • 84982515304 scopus 로고
    • Verteilungsfunktion und Transportkoeffizienten der Elektronen im schwachionisierten Helium-Quecksilber-Gemisch unter stationären homogenen Bedingungen
    • Wilhelm J, Winkler R and Freytag H D 1970 Verteilungsfunktion und Transportkoeffizienten der Elektronen im schwachionisierten Helium-Quecksilber- Gemisch unter stationären homogenen Bedingungen Ann. Phys. Lpz. 480 389-402
    • (1970) Ann. Phys. Lpz. , vol.480 , Issue.4 , pp. 389-402
    • Wilhelm, J.1    Winkler, R.2    Freytag, H.D.3
  • 88
    • 84981886592 scopus 로고
    • Stoßbestimmte Relaxation des Elektronenensembles im Plasma bei zusätzlicher Aufheizung durch ein elektrisches Feld: I. Die charakteristischen zeiten für den bergang in stationäre zustände
    • Wilhelm J and Winkler R 1977 Stoßbestimmte Relaxation des Elektronenensembles im Plasma bei zusätzlicher Aufheizung durch ein elektrisches Feld: I. Die charakteristischen zeiten für den bergang in stationäre zustände Ann. Phys. Lpz. 489 119-36
    • (1977) Ann. Phys. Lpz. , vol.489 , Issue.2 , pp. 119-136
    • Wilhelm, J.1    Winkler, R.2
  • 89
    • 84973528628 scopus 로고
    • Die Relaxation der Isotropverteilung und makroskopischer Kenngrößen der elektronen im abklingenden feldfreien neon-plasma
    • Wilhelm J and Winkler R 1977 Die Relaxation der Isotropverteilung und makroskopischer Kenngrößen der elektronen im abklingenden feldfreien neon-plasma Ann. Phys. Lpz. 489 385-401
    • (1977) Ann. Phys. Lpz. , vol.489 , Issue.5 , pp. 385-401
    • Wilhelm, J.1    Winkler, R.2
  • 90
    • 70350637082 scopus 로고
    • Stoßbestimmte Relaxation des elektronenensembles im plasma bei zusätzlicher aufheizung durch ein elektrisches Feld: III. das periodische verhalten der elektronenkomponente im elektrischen feld großen modulationsgrades
    • Wilhelm J and Winkler R 1978 Stoßbestimmte Relaxation des elektronenensembles im plasma bei zusätzlicher aufheizung durch ein elektrisches Feld: III. Das periodische verhalten der elektronenkomponente im elektrischen feld großen modulationsgrades Ann. Phys. Lpz. 490 321-43
    • (1978) Ann. Phys. Lpz. , vol.490 , Issue.5 , pp. 321-343
    • Wilhelm, J.1    Winkler, R.2
  • 91
    • 70350643966 scopus 로고
    • Zum verhalten des elektronenensembles im anisothermen schwachionisierten plasma bei einwirkung eines hochfrequenten elektrischen feldes
    • Wilhelm J and Winkler R 1979 Zum verhalten des elektronenensembles im anisothermen schwachionisierten plasma bei einwirkung eines hochfrequenten elektrischen feldes Ann. Phys. Lpz. 491 103-20
    • (1979) Ann. Phys. Lpz. , vol.491 , Issue.2 , pp. 103-120
    • Wilhelm, J.1    Winkler, R.2
  • 92
    • 70350688255 scopus 로고
    • Die berücksichtigung der ionisation durch elektronenstoß in der elektronenkinetik des schwachionisierten anisothermen Plasmas: III. das instationäre Verhalten bei großer impulsförmiger Feldstörung
    • Wilhelm J and Winkler R 1980 Die berücksichtigung der ionisation durch elektronenstoß in der elektronenkinetik des schwachionisierten anisothermen Plasmas: III. Das instationäre Verhalten bei großer impulsförmiger Feldstörung Ann. Phys. Lpz. 492 35-56
    • (1980) Ann. Phys. Lpz. , vol.492 , Issue.1 , pp. 35-56
    • Wilhelm, J.1    Winkler, R.2
  • 93
    • 84985810425 scopus 로고
    • Electron kinetics of weakly ionized HF plasmas: I. Direct treatment and Fourier expansion
    • Winkler R, Wilhelm J, Deutsch H and Wilke C 1984 Electron kinetics of weakly ionized HF plasmas: I. Direct treatment and Fourier expansion Beiträge Plasmaphys. 24 285-302
    • (1984) Beiträge Plasmaphys. , vol.24 , Issue.3 , pp. 285-302
    • Winkler, R.1    Wilhelm, J.2    Deutsch, H.3    Wilke, C.4
  • 94
    • 84981969928 scopus 로고
    • Main features of the electron kinetics in collision dominated steady-state rf plasmas
    • Winkler R, Wilhelm J and Hess A 1985 Main features of the electron kinetics in collision dominated steady-state rf plasmas Ann. Phys. Lpz. 497 537-58
    • (1985) Ann. Phys. Lpz. , vol.497 , Issue.4-6 , pp. 537-558
    • Winkler, R.1    Wilhelm, J.2    Hess, A.3
  • 95
    • 84981932392 scopus 로고
    • The influence of admixtures of molecular gases on the efficiency of radiation production by arhg mixture plasmas used in fluorescent lamps
    • Winkler R B, Wilhelm J and Winkler R 1982 The influence of admixtures of molecular gases on the efficiency of radiation production by arhg mixture plasmas used in fluorescent lamps Ann. Phys. Lpz. 494 10-22
    • (1982) Ann. Phys. Lpz. , vol.494 , Issue.1 , pp. 10-22
    • Winkler, R.B.1    Wilhelm, J.2    Winkler, R.3
  • 96
    • 84981963875 scopus 로고
    • Kinetics of the Ar-Hg Plasma of Fluorescent Lamp Discharges: I. Model - Basic Equations - Hg Partial Pressure Variation
    • Winkler R B, Wilhelm J and Winkler R 1983 Kinetics of the Ar-Hg Plasma of Fluorescent Lamp Discharges: I. Model - Basic Equations - Hg Partial Pressure Variation Ann. Phys. Lpz. 495 90-118
    • (1983) Ann. Phys. Lpz. , vol.495 , Issue.2-3 , pp. 90-118
    • Winkler, R.B.1    Wilhelm, J.2    Winkler, R.3
  • 97
    • 36149069583 scopus 로고
    • The effect of the two-term lorentz approximation on the townsend-huxley diffusion experiment
    • Francey J L A and Stewart P K 1972 The effect of the two-term lorentz approximation on the townsend-huxley diffusion experiment J. Phys. B: At. Mol. Phys. 5 2025-31
    • (1972) J. Phys. B: At. Mol. Phys. , vol.5 , Issue.11 , pp. 2025-2031
    • Francey, J.L.A.1    Stewart, P.K.2
  • 98
    • 49649140543 scopus 로고
    • On the tree-term approximation of the solution of the Boltzmann equation for weakly ionized gases
    • Ferrari L 1975 On the tree-term approximation of the solution of the Boltzmann equation for weakly ionized gases Physica A 81 276-94
    • (1975) Physica , vol.81 , Issue.2 , pp. 276-294
    • Ferrari, L.1
  • 99
    • 49549127345 scopus 로고
    • Inelastic collisions and velocity distribution function of electrons in a gas in an electric field
    • Ferrari L 1977 Inelastic collisions and velocity distribution function of electrons in a gas in an electric field Physica B+C 85 161-79
    • (1977) Physica , vol.85 , Issue.1 , pp. 161-179
    • Ferrari, L.1
  • 100
    • 36149043728 scopus 로고
    • Experimental determination of electron energy distribution functions in townsend discharges in argon
    • Makabe T, Goto T and Mori T 1977 Experimental determination of electron energy distribution functions in townsend discharges in argon J. Phys. B: At. Mol. Phys. 10 1781-7
    • (1977) J. Phys. B: At. Mol. Phys. , vol.10 , Issue.9 , pp. 1781-1787
    • Makabe, T.1    Goto, T.2    Mori, T.3
  • 101
    • 36149049504 scopus 로고
    • Experimental and theoretical analysis of the electron energy distribution functions in townsend discharges in xenon
    • Makabe T and Mori T 1978 Experimental and theoretical analysis of the electron energy distribution functions in townsend discharges in xenon J. Phys. B: At. Mol. Phys. 11 3785-93
    • (1978) J. Phys. B: At. Mol. Phys. , vol.11 , Issue.21 , pp. 3785-3793
    • Makabe, T.1    Mori, T.2
  • 102
    • 0018996394 scopus 로고
    • Theoretical analysis of the electron energy distribution functions in a weakly ionised gas under a relatively high e/n
    • Makabe T and Mori T 1980 Theoretical analysis of the electron energy distribution functions in a weakly ionised gas under a relatively high e/n J. Phys. D: Appl. Phys. 13 387-96
    • (1980) J. Phys. D: Appl. Phys. , vol.13 , Issue.3 , pp. 387-396
    • Makabe, T.1    Mori, T.2
  • 103
    • 0001530761 scopus 로고
    • Extended boltzmann analysis of electron swarm experiments
    • Pitchford L C, ONeil S V and Rumble J R 1981 Extended boltzmann analysis of electron swarm experiments Phys. Rev. A 23 294-304
    • (1981) Phys. Rev. , vol.23 , Issue.1 , pp. 294-304
    • Pitchford, L.C.1    Oneil, S.V.2    Rumble, J.R.3
  • 105
    • 84981928062 scopus 로고
    • Electron Kinetics with attachment and ionization from higher order solutions of Boltzmann's equation
    • Winkler R, Braglia G L and Wilhelm J 1989 Electron Kinetics with attachment and ionization from higher order solutions of Boltzmann's equation Ann. Phys. Lpz. 501 21-40
    • (1989) Ann. Phys. Lpz. , vol.501 , Issue.1 , pp. 21-40
    • Winkler, R.1    Braglia, G.L.2    Wilhelm, J.3
  • 106
    • 0002944210 scopus 로고
    • A new nonstationary Boltzmann solver in self-consistent modelling of discharge pumped plasmas for excimer lasers
    • Loffhagen D and Winkler R 1994 A new nonstationary Boltzmann solver in self-consistent modelling of discharge pumped plasmas for excimer lasers J. Comput. Phys. 112 91-101
    • (1994) J. Comput. Phys. , vol.112 , Issue.1 , pp. 91-101
    • Loffhagen, D.1    Winkler, R.2
  • 107
    • 0032360982 scopus 로고    scopus 로고
    • Time-dependent multi-term treatment of plasma electrons acted upon by rf electric fields
    • Loffhagen D, Braglia G L and Winkler R 1998 Time-dependent multi-term treatment of plasma electrons acted upon by rf electric fields Contrib. Plasma Phys. 38 527-51
    • (1998) Contrib. Plasma Phys. , vol.38 , Issue.4 , pp. 527-551
    • Loffhagen, D.1    Braglia, G.L.2    Winkler, R.3
  • 108
    • 36749117711 scopus 로고
    • Moment theory of electron drift and diffusion in neutral gases in an electrostatic field
    • Lin S L, Robson R E and Mason E A 1979 Moment theory of electron drift and diffusion in neutral gases in an electrostatic field J. Chem. Phys. 71 3483-98
    • (1979) J. Chem. Phys. , vol.71 , Issue.8 , pp. 3483-3498
    • Lin, S.L.1    Robson, R.E.2    Mason, E.A.3
  • 109
    • 0039013395 scopus 로고
    • The mathematical theory of electrical discharges in gases: B. Velocity-distribution of positive ions in a static field
    • Kihara T 1953 The mathematical theory of electrical discharges in gases: b. Velocity-distribution of positive ions in a static field Rev. Mod. Phys. 25 844-52
    • (1953) Rev. Mod. Phys. , vol.25 , Issue.4 , pp. 844-852
    • Kihara, T.1
  • 110
    • 0041358006 scopus 로고
    • Gaseous lon mobility in electric fields of arbitrary strength
    • Viehland L A and Mason E A 1975 Gaseous lon mobility in electric fields of arbitrary strength Ann. Phys. 91 499-533
    • (1975) Ann. Phys. , vol.91 , Issue.2 , pp. 499-533
    • Viehland, L.A.1    Mason, E.A.2
  • 111
    • 0000887839 scopus 로고
    • Gaseous ion mobility and diffusion in electric fields of arbitrary strength
    • Viehland L A and Mason E A 1978 Gaseous ion mobility and diffusion in electric fields of arbitrary strength Ann. Phys. 110 287-328
    • (1978) Ann. Phys. , vol.110 , Issue.2 , pp. 287-328
    • Viehland, L.A.1    Mason, E.A.2
  • 112
    • 0000676092 scopus 로고
    • Velocity distribution function and transport coefficients of electron swarms in gases: Spherical-harmonics decomposition of Boltzmann's equation
    • Robson R E and Ness K F 1986 Velocity distribution function and transport coefficients of electron swarms in gases: spherical-harmonics decomposition of Boltzmann's equation Phys. Rev. A 33 2068-77
    • (1986) Phys. Rev. , vol.33 , Issue.3 , pp. 2068-2077
    • Robson, R.E.1    Ness, K.F.2
  • 113
    • 24444444938 scopus 로고
    • Velocity distribution function and transport coefficients of electron swarms in gases: II. Moment equations and applications
    • Ness K F and Robson R E 1986 Velocity distribution function and transport coefficients of electron swarms in gases: II. Moment equations and applications Phys. Rev. A 34 2185-209
    • (1986) Phys. Rev. , vol.34 , Issue.3 , pp. 2185-2209
    • Ness, K.F.1    Robson, R.E.2
  • 114
    • 0347319324 scopus 로고    scopus 로고
    • Is the classical two-term approximation of electron kinetic theory satisfactory for swarms and plasmas?
    • White R D, Robson R E, Schmidt B and Morrison M A 2003 Is the classical two-term approximation of electron kinetic theory satisfactory for swarms and plasmas? J. Phys. D: Appl. Phys. 36 3125-31
    • (2003) J. Phys. D: Appl. Phys. , vol.36 , Issue.24 , pp. 3125-3131
    • White, R.D.1    Robson, R.E.2    Schmidt, B.3    Morrison, M.A.4
  • 115
    • 70350632626 scopus 로고    scopus 로고
    • Recent advances in the application of Boltzmann equation and fluid equation methods to charged particle transport in non-equilibrium plasmas
    • White R D, Robson R E, Dujko S, Nicoletopoulos P and Li B 2009 Recent advances in the application of Boltzmann equation and fluid equation methods to charged particle transport in non-equilibrium plasmas J. Phys. D: Appl. Phys. 42 194001 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194001
    • White, R.D.1    Robson, R.E.2    Dujko, S.3    Nicoletopoulos, P.4    Li, B.5
  • 117
    • 70350662238 scopus 로고    scopus 로고
    • The status of the database for plasma processing
    • Mason N J 2009 The status of the database for plasma processing J. Phys. D: Appl. Phys. 42 194003 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194003
    • Mason, N.J.1
  • 118
    • 70350650380 scopus 로고    scopus 로고
    • Collisionless heating in radio-frequency discharges: A review
    • Turner M M 2009 Collisionless heating in radio-frequency discharges: a review J. Phys. D: Appl. Phys. 42 194008 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194008
    • Turner, M.M.1
  • 119
    • 70350633324 scopus 로고    scopus 로고
    • From electron depletion to quasineutrality: The sheath-bulk transition in rf modulated discharges
    • Brinkmann R P 2009 From electron depletion to quasineutrality: The sheath-bulk transition in rf modulated discharges J. Phys. D: Appl. Phys. 42 194009 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194009
    • Brinkmann, R.P.1
  • 120
    • 70350683899 scopus 로고    scopus 로고
    • Cambridge monographs on Plasma Physics
    • Griem H R 1997 Cambridge monographs on Plasma Physics Principles of Plasma Spectroscopy (Cambridge: Cambridge University Press)
    • (1997) Principles of Plasma Spectroscopy
    • Griem, H.R.1
  • 121
    • 0039117925 scopus 로고
    • Mass action laws and the gibbs free energy function
    • Shapiro N Z and Shapley L S 1965 Mass action laws and the gibbs free energy function J. Soc. Indust. Appl. Math. 13 353-75
    • (1965) J. Soc. Indust. Appl. Math. , vol.13 , Issue.2 , pp. 353-375
    • Shapiro, N.Z.1    Shapley, L.S.2
  • 123
    • 84980054653 scopus 로고
    • Zur statistik des bohrschen wasserstoffatommodells
    • Herzfeld K F 1916 Zur statistik des bohrschen wasserstoffatommodells Ann. Phys. 356 261-84
    • (1916) Ann. Phys. , vol.356 , Issue.19 , pp. 261-284
    • Herzfeld, K.F.1
  • 126
    • 7544219526 scopus 로고    scopus 로고
    • A hierarchical approach for fast and accurate equilibrium calculation
    • Colonna G and D'Angola A 2004 A hierarchical approach for fast and accurate equilibrium calculation Comput. Phys. Commun. 163 177-90
    • (2004) Comput. Phys. Commun. , vol.163 , Issue.3 , pp. 177-190
    • Colonna, G.1    D'Angola, A.2
  • 127
    • 34547205086 scopus 로고    scopus 로고
    • Improvements of hierarchical algorithm for equilibrium calculation
    • Colonna G 2007 Improvements of hierarchical algorithm for equilibrium calculation Comput. Phys. Commun. 177 493-9
    • (2007) Comput. Phys. Commun. , vol.177 , Issue.6 , pp. 493-499
    • Colonna, G.1
  • 129
    • 36849108313 scopus 로고
    • Transport properties of ionized monatomic gases
    • Devoto R S 1966 Transport properties of ionized monatomic gases Phys. Fluids 9 1230-40
    • (1966) Phys. Fluids , vol.9 , Issue.6 , pp. 1230-1240
    • Devoto, R.S.1
  • 130
    • 36849134601 scopus 로고
    • Thermal conductivity of gas mixtures in chemical equilibrium
    • Butler J N and Brokaw R S 1957 Thermal conductivity of gas mixtures in chemical equilibrium J. Chem. Phys. 26 1636-43
    • (1957) J. Chem. Phys. , vol.26 , Issue.6 , pp. 1636-1643
    • Butler, J.N.1    Brokaw, R.S.2
  • 131
    • 0001667663 scopus 로고
    • Diffusion in equilibrium mixtures of ionized gases
    • Murphy A B 1993 Diffusion in equilibrium mixtures of ionized gases Phys. Rev. E 48 3594-603
    • (1993) Phys. Rev. , vol.48 , Issue.5 , pp. 3594-3603
    • Murphy, A.B.1
  • 133
    • 3242887355 scopus 로고    scopus 로고
    • Transport algorithms for partially ionized and unmagnetized plasmas
    • DOI 10.1016/j.jcp.2004.01.012, PII S0021999104000361
    • Magin T E and Degrez G 2004 Transport algorithms for partially ionized and unmagnetized plasmas J. Comput. Phys. 198 424-49 (Pubitemid 38999046)
    • (2004) Journal of Computational Physics , vol.198 , Issue.2 , pp. 424-449
    • Magin, T.E.1    Degrez, G.2
  • 134
    • 27244439969 scopus 로고    scopus 로고
    • Closed form for the equations of chemically reacting flows under local thermodynamic equilibrium
    • Rini P, Abeele D V and Degrez G 2005 Closed form for the equations of chemically reacting flows under local thermodynamic equilibrium Phys. Rev. E 72 011204
    • (2005) Phys. Rev. , vol.72 , Issue.1 , pp. 011204
    • Rini, P.1    Abeele, D.V.2    Degrez, G.3
  • 135
    • 37649029729 scopus 로고    scopus 로고
    • Electronically excited states and transport properties of thermal plasmas: The reactive thermal conductivity
    • Capitelli M, Celiberto R, Gorse C, Laricchiuta A, Minelli P and Pagano D 2002 Electronically excited states and transport properties of thermal plasmas: the reactive thermal conductivity Phys. Rev. E 66 016403
    • (2002) Phys. Rev. , vol.66 , Issue.1 , pp. 016403
    • Capitelli, M.1    Celiberto, R.2    Gorse, C.3    Laricchiuta, A.4    Minelli, P.5    Pagano, D.6
  • 136
    • 37649027993 scopus 로고    scopus 로고
    • Transport properties of local thermodynamic equilibrium hydrogen plasmas including electronically excited states
    • Capitelli M, Celiberto R, Gorse C, Laricchiuta A, Pagano D and Traversa P 2004 Transport properties of local thermodynamic equilibrium hydrogen plasmas including electronically excited states Phys. Rev. E 69 026412
    • (2004) Phys. Rev. , vol.69 , Issue.2 , pp. 026412
    • Capitelli, M.1    Celiberto, R.2    Gorse, C.3    Laricchiuta, A.4    Pagano, D.5    Traversa, P.6
  • 137
    • 33746844484 scopus 로고    scopus 로고
    • Convergence of Chapman-Enskog calculation of transport coefficients of magnetized argon plasma
    • Bruno D, Catalfamo C, Laricchiuta A, Giordano D and Capitelli M 2006 Convergence of Chapman-Enskog calculation of transport coefficients of magnetized argon plasma Phys. Plasmas 13 072307
    • (2006) Phys. Plasmas , vol.13 , Issue.7 , pp. 072307
    • Bruno, D.1    Catalfamo, C.2    Laricchiuta, A.3    Giordano, D.4    Capitelli, M.5
  • 138
    • 33847753115 scopus 로고    scopus 로고
    • Effect of electronic excited states on transport in magnetized hydrogen plasma
    • Bruno D, Laricchiuta A, Capitelli M and Catalfamo C 2007 Effect of electronic excited states on transport in magnetized hydrogen plasma Phys. Plasmas 14 022303
    • (2007) Phys. Plasmas , vol.14 , Issue.2 , pp. 022303
    • Bruno, D.1    Laricchiuta, A.2    Capitelli, M.3    Catalfamo, C.4
  • 139
    • 34547564145 scopus 로고    scopus 로고
    • Transport of internal electronic energy in atomic hydrogen thermal plasmas
    • Bruno D, Capitelli M, Catalfamo C and Laricchiuta A 2007 Transport of internal electronic energy in atomic hydrogen thermal plasmas Phys. Plasmas 14 072308
    • (2007) Phys. Plasmas , vol.14 , Issue.7 , pp. 072308
    • Bruno, D.1    Capitelli, M.2    Catalfamo, C.3    Laricchiuta, A.4
  • 140
    • 33947701968 scopus 로고    scopus 로고
    • Influence of the excited states of atomic nitrogen n (2d), n (2p) and n (r) on the transport properties of nitrogen: II: Nitrogen plasma properties
    • Sourd B, André P, Aubreton J and Elchinger M-F 2007 Influence of the excited states of atomic nitrogen n (2d), n (2p) and n (r) on the transport properties of nitrogen: II: Nitrogen plasma properties Plasma Chem. Plasma Process. 27 225-40
    • (2007) Plasma Chem. Plasma Process. , vol.27 , Issue.2 , pp. 225-240
    • Sourd, B.A.1
  • 141
    • 0016973012 scopus 로고
    • Axial segregation of additives in mercury-metal-halide arcs
    • Fischer E 1976 Axial segregation of additives in mercury-metal-halide arcs J. Appl. Phys. 47 2954-60
    • (1976) J. Appl. Phys. , vol.47 , Issue.7 , pp. 2954-2960
    • Fischer, E.1
  • 147
    • 70350628871 scopus 로고    scopus 로고
    • Thermodynamics and transport properties of thermal plasmas: The role of electronic excitation
    • Capitelli M, Bruno D, Colonna G, Catalfamo C and Lariccchiuta A 2009 Thermodynamics and transport properties of thermal plasmas: the role of electronic excitation J. Phys. D: Appl. Phys. 42 194005 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194005
    • Capitelli, M.1    Bruno, D.2    Colonna, G.3    Catalfamo, C.4    Lariccchiuta, A.5
  • 148
    • 70249101349 scopus 로고    scopus 로고
    • Modelling of thermal plasmas for arc welding: The role of the shielding gas properties and of metal vapour
    • Murphy A B, Tanaka M, Yamamoto K, Tashiro S, Sato T and Lowke J J 2009 Modelling of thermal plasmas for arc welding: the role of the shielding gas properties and of metal vapour J. Phys. D: Appl. Phys. 42 194006 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194006
    • Murphy, A.B.1    Tanaka, M.2    Yamamoto, K.3    Tashiro, S.4    Sato, T.5    Lowke, J.J.6
  • 149
    • 36849126204 scopus 로고
    • Studies in molecular dynamics: I. general method
    • Alder B J and Wainwright T E 1959 Studies in molecular dynamics: I. general method J. Chem. Phys. 31 459-66
    • (1959) J. Chem. Phys. , vol.31 , Issue.2 , pp. 459-466
    • Alder, B.J.1    Wainwright, T.E.2
  • 150
    • 70350655451 scopus 로고    scopus 로고
    • Molecular dynamics for low temperature plasma-surface interaction studies
    • Graves D B and Brault P 2009 Molecular dynamics for low temperature plasma-surface interaction studies J. Phys. D: Appl. Phys. 42 194011 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194011
    • Graves, D.B.1    Brault, P.2
  • 151
    • 0000440170 scopus 로고
    • Transition between different regimes of rf glow discharges
    • Belenguer Ph and Boeuf J P 1990 Transition between different regimes of rf glow discharges Phys. Rev. A 41 4447-59
    • (1990) Phys. Rev. , vol.41 , Issue.8 , pp. 4447-4459
    • Ph, B.1    Boeuf, J.P.2
  • 154
    • 33645688622 scopus 로고    scopus 로고
    • Kinetic properties of particle-in-cell simulations compromised by Monte Carlo collisions
    • Turner M M 2006 Kinetic properties of particle-in-cell simulations compromised by Monte Carlo collisions Phys. Plasmas 13 033506
    • (2006) Phys. Plasmas , vol.13 , Issue.3 , pp. 033506
    • Turner, M.M.1
  • 155
    • 33745586628 scopus 로고    scopus 로고
    • 2 discharge in an asymmetric dual frequency reactor: Numerical investigation by a PIC/MC model
    • 2 discharge in an asymmetric dual frequency reactor: numerical investigation by a PIC/MC model Plasma Sources Sci. Technol. 15 368-77
    • (2006) Plasma Sources Sci. Technol. , vol.15 , Issue.3 , pp. 368-377
    • Georgieva, V.1    Bogaerts, A.2
  • 158
    • 2942622048 scopus 로고    scopus 로고
    • Combined PIC and MCC approach for fast simulation of a radio frequency discharge at a low gas pressure
    • Schweigert I V and Schweigert V A 2004 Combined PIC and MCC approach for fast simulation of a radio frequency discharge at a low gas pressure Plasma Sources Sci. Technol. 13 315-20
    • (2004) Plasma Sources Sci. Technol. , vol.13 , Issue.2 , pp. 315-320
    • Schweigert, I.V.1    Schweigert, V.A.2
  • 159
    • 18744397592 scopus 로고    scopus 로고
    • Two-dimensional PIC-MCC simulations of a capacitively coupled radio frequency discharge in methane
    • Alexandrov A L and Schweigert I V 2005 Two-dimensional PIC-MCC simulations of a capacitively coupled radio frequency discharge in methane Plasma Sources Sci. Technol. 14 209-18
    • (2005) Plasma Sources Sci. Technol. , vol.14 , Issue.2 , pp. 209-218
    • Alexandrov, A.L.1    Schweigert, I.V.2
  • 160
    • 0034247805 scopus 로고    scopus 로고
    • Physical and numerical methods of speeding up particle codes and paralleling as applied to rf discharges
    • Kawamura E, Birdsall C K and Vahedi V 2000 Physical and numerical methods of speeding up particle codes and paralleling as applied to rf discharges Plasma Sources Sci. Technol. 9 413-28
    • (2000) Plasma Sources Sci. Technol. , vol.9 , Issue.3 , pp. 413-428
    • Kawamura, E.1    Birdsall, C.K.2    Vahedi, V.3
  • 161
    • 43049141178 scopus 로고    scopus 로고
    • Spatial coupling of particle and fluid models for streamers: Where nonlocality matters
    • Li C, Ebert U, Brok W J M and Hundsdorfer W 2008 Spatial coupling of particle and fluid models for streamers: where nonlocality matters J. Phys. D: Appl. Phys. 41 032005
    • (2008) J. Phys. D: Appl. Phys. , vol.41 , Issue.3 , pp. 032005
    • Li, C.1    Ebert, U.2    Brok, W.J.M.3    Hundsdorfer, W.4
  • 162
    • 33751091487 scopus 로고    scopus 로고
    • An adaptive grid refinement strategy for the simulation of negative streamers
    • Montijn C, Hundsdorfer W and Ebert U 2006 An adaptive grid refinement strategy for the simulation of negative streamers J. Comput. Phys. 219 801-35
    • (2006) J. Comput. Phys. , vol.219 , Issue.2 , pp. 801-835
    • Montijn, C.1    Hundsdorfer, W.2    Ebert, U.3
  • 163
    • 70350635386 scopus 로고    scopus 로고
    • Review of profile and roughening simulation in microelectronics plasma etching
    • Guo W and Sawin H H 2009 Review of profile and roughening simulation in microelectronics plasma etching J. Phys. D: Appl. Phys. 42 194014 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194014
    • Guo, W.1    Sawin, H.H.2
  • 164
    • 70350676177 scopus 로고    scopus 로고
    • Hydrodynamic and kinetic modelling of complex radio frequency plasmas
    • Goedheer W J, Land V and Venema J 2009 Hydrodynamic and kinetic modelling of complex radio frequency plasmas J. Phys. D: Appl. Phys. 42 194015 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194015
    • Goedheer, W.J.1    Land, V.2    Venema, J.3
  • 167
    • 70350626745 scopus 로고    scopus 로고
    • Modeling of a nanosecond surface discharge actuator
    • Unfer Th and Boeuf J P 2009 Modeling of a nanosecond surface discharge actuator J. Phys. D: Appl. Phys. 42 194017 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194017
    • Th, U.1    Boeuf, J.P.2
  • 168
    • 84944813394 scopus 로고
    • Ueber die elektrostatische induction und die verzögerung des stroms in flaschendrähten
    • Siemens W 1857 Ueber die elektrostatische induction und die verzögerung des stroms in flaschendrähten Anna. Phys. Chem. 178 66-122
    • (1857) Anna. Phys. Chem. , vol.178 , Issue.9 , pp. 66-122
    • Siemens, W.1
  • 169
    • 0000375249 scopus 로고    scopus 로고
    • From ozone generators to flat television screens: History and future potential of dielectric-barrier discharges
    • Kogelschatz U, Eliasson B and Egli W 1999 From ozone generators to flat television screens: history and future potential of dielectric-barrier discharges Pure Appl. Chem. 71 1819-28
    • (1999) Pure Appl. Chem. , vol.71 , Issue.10 , pp. 1819-1828
    • Kogelschatz, U.1    Eliasson, B.2    Egli, W.3
  • 170
    • 70350646786 scopus 로고    scopus 로고
    • Modelling of a dipolar microwave plasma sustained by electron cyclotron resonance
    • Hagelaar G J M, Makasheva K, Garrigues L and Boeuf J-P 2009 Modelling of a dipolar microwave plasma sustained by electron cyclotron resonance J. Phys. D: Appl. Phys. 42 194019 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194019
    • Hagelaar, G.J.M.1    Makasheva, K.2    Garrigues, L.3    Boeuf, J.-P.4
  • 173
    • 35949028371 scopus 로고
    • Elastic and inelastic cross sections for electron-Hg scattering from hg transport data
    • Rockwood S D 1973 Elastic and inelastic cross sections for electron-Hg scattering from hg transport data Phys. Rev. A 8 2348-58
    • (1973) Phys. Rev. , vol.8 , Issue.5 , pp. 2348-2358
    • Rockwood, S.D.1
  • 175
    • 3142731346 scopus 로고
    • Boltz: A code to solve the transport equation for electron distributions and then calculate transport coefficients and vibrational excitation rates in gases with applied fields
    • Thomson R M, Smith K and Davies A R 1976 Boltz: a code to solve the transport equation for electron distributions and then calculate transport coefficients and vibrational excitation rates in gases with applied fields Comput. Phys. Commun. 11 369-83
    • (1976) Comput. Phys. Commun. , vol.11 , Issue.3 , pp. 369-383
    • Thomson, R.M.1    Smith, K.2    Davies, A.R.3
  • 176
    • 0019044048 scopus 로고
    • Numerical solutions of the boltzmann transport equation
    • Rockwood S D and Greene A E 1980 Numerical solutions of the boltzmann transport equation Comput. Phys. Commun. 19 377-93
    • (1980) Comput. Phys. Commun. , vol.19 , Issue.3 , pp. 377-393
    • Rockwood, S.D.1    Greene, A.E.2
  • 177
    • 0025385040 scopus 로고
    • Elendif: A time-dependent boltzmann solver for partially ionized plasmas
    • Morgan W L and Penetrante B M 1990 Elendif: a time-dependent boltzmann solver for partially ionized plasmas Comput. Phys. Commun. 58 127-52
    • (1990) Comput. Phys. Commun. , vol.58 , Issue.1-2 , pp. 127-152
    • Morgan, W.L.1    Penetrante, B.M.2
  • 178
    • 0001634011 scopus 로고
    • Simultaneous potential and circuit solution for 1D bounded plasma particle simulation codes
    • Verboncoeur J P, Alves M V, Vahedi V and Birdsall C K 1993 Simultaneous potential and circuit solution for 1D bounded plasma particle simulation codes J. Comput. Phys. 104 321-28
    • (1993) J. Comput. Phys. , vol.104 , Issue.2 , pp. 321-328
    • Verboncoeur, J.P.1    Alves, M.V.2    Vahedi, V.3    Birdsall, C.K.4
  • 179
    • 0029632820 scopus 로고
    • An object-oriented electromagnetic PIC code
    • Verboncoeur J P, Langdon A B and Gladd N T 1995 An object-oriented electromagnetic PIC code Comput. Phys. Commun. 87 199-211 (Particle Simulation Methods)
    • (1995) Comput. Phys. Commun. , vol.87 , Issue.1-2 , pp. 199-211
    • Verboncoeur, J.P.1    Langdon, A.B.2    Gladd, N.T.3
  • 180
    • 0001383489 scopus 로고
    • Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations
    • Vahedi V, Birdsall C K, Lieberman M A, DiPeso G and Rognlien T D 1993 Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations Phys. Fluids B: Plasma Phys. 5 2719-29
    • (1993) Phys. Fluids B: Plasma Phys. , vol.5 , Issue.7 , pp. 2719-2729
    • Vahedi, V.1    Birdsall, C.K.2    Lieberman, M.A.3    Dipeso, G.4    Rognlien, T.D.5
  • 181
    • 0000875694 scopus 로고    scopus 로고
    • Simultaneous potential and circuit solution for two-dimensional bounded plasma simulation codes
    • Vahedi V and DiPeso G 1997 Simultaneous potential and circuit solution for two-dimensional bounded plasma simulation codes J. Comput. Phys. 131 149-63
    • (1997) J. Comput. Phys. , vol.131 , Issue.1 , pp. 149-163
    • Vahedi, V.1    Dipeso, G.2
  • 182
    • 70350644676 scopus 로고    scopus 로고
    • Integral and Lagrangian simulations of particle and radiation transport in plasma
    • Christlieb A J, Hitchon W N G, Lawler J E and Lister G G 2009 Integral and Lagrangian simulations of particle and radiation transport in plasma J. Phys. D: Appl. Phys. 42 194007 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194007
    • Christlieb, A.J.1    Hitchon, W.N.G.2    Lawler, J.E.3    Lister, G.G.4
  • 183
    • 70350680321 scopus 로고    scopus 로고
    • Analyzing bifurcations encountered in numerical modelling of current transfer to cathodes of DC glow and arc discharges
    • Almeida P G C, Benilov M S, Cunha M D and Faria M J 2009 Analyzing bifurcations encountered in numerical modelling of current transfer to cathodes of DC glow and arc discharges J. Phys. D: Appl. Phys. 42 194010 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194010
    • Almeida, P.G.C.1    Benilov, M.S.2    Cunha, M.D.3    Faria, M.J.4
  • 184
    • 70350650351 scopus 로고    scopus 로고
    • Fluid model of an electronegative discharge with magnetized electrons and unmagnetized ions
    • Leray G, Chabert P, Lichtenberg A J and Liebermann M A 2009 Fluid model of an electronegative discharge with magnetized electrons and unmagnetized ions J. Phys. D: Appl. Phys. 42 194020 (this issue)
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.19 , pp. 194020
    • Leray, G.1    Chabert, P.2    Lichtenberg, A.J.3    Liebermann, M.A.4


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