Self-consistent electrodynamics of large-area high-frequency capacitive plasma discharge

Journal of Applied Physics

Volumn 108, Issue 7, 2010, Pages

  Chen, Zhigang ^a   Rauf, Shahid ^a   Collins, Ken ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED PLASMAS; ELECTRODE SIZE; FULL-WAVE SOLUTIONS; GAS PRESSURES; HIGH FREQUENCY; HIGH FREQUENCY HF; INTEGRATED SYSTEMS; MAXWELL'S EQUATIONS; NEUTRAL SPECIES; PHYSICAL PICTURES; PLASMA BEHAVIOR; PLASMA DISCHARGE; PLASMA DISTRIBUTION; PLASMA DYNAMICS; PLASMA PROCESS; PLASMA PROCESSING; RADIO FREQUENCIES; RF PLASMA; RF-POWER; SELF-CONSISTENT MODEL; THREE-DIMENSIONAL MODEL; TIME DOMAIN; TRANSPORT EQUATION; VERY HIGH FREQUENCY;

DEPOSITION; ELECTRIC POWER TRANSMISSION; ELECTRODYNAMICS; ELECTROMAGNETIC FIELDS; ELECTROMAGNETIC WAVE DIFFRACTION; ELECTROMAGNETIC WAVE SCATTERING; ELECTROMAGNETIC WAVES; INTEGRATED OPTICS; MAGNETIC MATERIALS; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PLASMA DENSITY; PLASMA DEPOSITION; PLASMAS; THREE DIMENSIONAL; WAVE PROPAGATION;

ELECTRIC DISCHARGES;

EID: 77958157526     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3489950     Document Type: Article

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