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Volumn 2, Issue 4, 2012, Pages 569-577

Laser-enabled advanced packaging of ultrathin bare dice in flexible substrates

Author keywords

Embedded chips; flexible electronics; laser induced forward transfer; ultrathin semiconductor die

Indexed keywords

ADVANCED PACKAGING; BANK CARDS; COST-EFFICIENT; EMBEDDED CHIPS; FLEXIBLE SUBSTRATE; HIGH THROUGHPUT; LASER INDUCED FORWARD TRANSFER; NANOSCALE SCIENCE AND ENGINEERING; NORTH DAKOTA STATE UNIVERSITIES; PRODUCT DESIGNERS; RADIO FREQUENCIES; RF-ID TAGS; ULTRA-THIN; ULTRA-THIN CHIPS;

EID: 84859762839     PISSN: 21563950     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCPMT.2011.2176941     Document Type: Article
Times cited : (51)

References (68)
  • 6
    • 84859778212 scopus 로고    scopus 로고
    • 3-D assemblies of stacked chips and other thin packages
    • J. W. Balde, Ed. Boston, MA: Kluwer
    • J. W. Balde, "3-D assemblies of stacked chips and other thin packages," in Foldable Flex and Thinned Silicon Multichip Packaging Technology, J. W. Balde, Ed. Boston, MA: Kluwer, 2003, pp. 1-14.
    • (2003) Foldable Flex and Thinned Silicon Multichip Packaging Technology , pp. 1-14
    • Balde, J.W.1
  • 11
    • 57349117070 scopus 로고    scopus 로고
    • Gold/tin soldering of flexible silicon chips onto polymer tapes
    • K. Hungar and W. Mokwa, "Gold/tin soldering of flexible silicon chips onto polymer tapes," J. Micromech. Microeng., vol. 18, no. 6, p. 064002, 2008.
    • (2008) J. Micromech. Microeng. , vol.18 , Issue.6 , pp. 064002
    • Hungar, K.1    Mokwa, W.2
  • 14
    • 84876580017 scopus 로고    scopus 로고
    • Super thin flip chip assemblies on flex substrates-adhesive bonding and soldering technology-reliability investigations and applications
    • Oct.
    • J. Haberland, B. Pahl, C. Kallmayer, R. Aschenbrenner, and H. Reichl, "Super thin flip chip assemblies on flex substrates-adhesive bonding and soldering technology-reliability investigations and applications," in Proc. IMAPS Int. Symp. Microelectron., San Diego, CA, Oct. 2006, pp. 1-7.
    • (2006) Proc. IMAPS Int. Symp. Microelectron., San Diego, CA , pp. 1-7
    • Haberland, J.1    Pahl, B.2    Kallmayer, C.3    Aschenbrenner, R.4    Reichl, H.5
  • 20
    • 0037281908 scopus 로고    scopus 로고
    • Ultrathin ICs and MEMS elements: Techniques for wafer thinning, stress-free separation, assembly and interconnection
    • M. Feil, C. Alder, G. Klink, M. König, C. Landesberger, S. Scherbaum, G. Schwinn, and H. Spöhrle, "Ultrathin ICs and MEMS elements: Techniques for wafer thinning, stress-free separation, assembly and interconnection," Microsyst. Technol., vol. 9, no. 3, pp. 176-182, 2003.
    • (2003) Microsyst. Technol. , vol.9 , Issue.3 , pp. 176-182
    • Feil, M.1    Alder, C.2    Klink, G.3    König, M.4    Landesberger, C.5    Scherbaum, S.6    Schwinn, G.7    Spöhrle, H.8
  • 23
    • 78651101399 scopus 로고    scopus 로고
    • UTCP: A novel polyimide-based ultrathin chip packaging technology
    • Dec.
    • W. Christiaens, E. Bosman, and J. Vanfleteren, "UTCP: A novel polyimide-based ultrathin chip packaging technology," IEEE Trans. Comp. Packag. Technol., vol. 33, no. 4, pp. 754-760, Dec. 2010.
    • (2010) IEEE Trans. Comp. Packag. Technol. , vol.33 , Issue.4 , pp. 754-760
    • Christiaens, W.1    Bosman, E.2    Vanfleteren, J.3
  • 27
    • 84859762718 scopus 로고    scopus 로고
    • Low-profile and flexible electronic assemblies using ultrathin silicon - The European FLEX-SI project
    • J.W. Balde, Ed. Boston, MA: Kluwer
    • T. Harder and W. Reinert, "Low-profile and flexible electronic assemblies using ultrathin silicon -the European FLEX-SI project," in Foldable Flex and Thinned Silicon Multichip Packaging Technology, J.W. Balde, Ed. Boston, MA: Kluwer, 2003.
    • (2003) Foldable Flex and Thinned Silicon Multichip Packaging Technology
    • Harder, T.1    Reinert, W.2
  • 28
    • 61649096407 scopus 로고    scopus 로고
    • Fabrication processes for embedding thin chips in flat flexible substrates
    • Feb.
    • J. Govaerts, W. Christiaens, E. Bosman, and J. Vanfleteren, "Fabrication processes for embedding thin chips in flat flexible substrates," IEEE Trans. Adv. Packag., vol. 32, no. 1, pp. 77-83, Feb. 2009.
    • (2009) IEEE Trans. Adv. Packag. , vol.32 , Issue.1 , pp. 77-83
    • Govaerts, J.1    Christiaens, W.2    Bosman, E.3    Vanfleteren, J.4
  • 30
    • 84859762717 scopus 로고    scopus 로고
    • Jun.) [Online]. Available
    • House of Cards: Consumer Reports Magazine. (2011, Jun.) [Online]. Available: http://www.consumerreports.org/cro/magazine-archive/2011/june/june- 2011-toc.htm
    • (2011) House of Cards: Consumer Reports Magazine
  • 31
    • 35248832722 scopus 로고    scopus 로고
    • Squealing euros: Privacy protection in RFIDenabled banknotes
    • R. Wright, Ed. Berlin, Germany: Springer Verlag
    • A. Juels and R. Pappu, "Squealing euros: Privacy protection in RFIDenabled banknotes," in Financial Cryptography. vol. 2742, R. Wright, Ed. Berlin, Germany: Springer-Verlag, 2003, pp. 103-121.
    • (2003) Financial Cryptography. , vol.2742 , pp. 103-121
    • Juels, A.1    Pappu, R.2
  • 32
    • 84859764298 scopus 로고    scopus 로고
    • RFID in Banknotes
    • RFID in Banknotes. (2002) [Online]. Available: http://www.prisonplanet. com/RFID.pdf
    • (2002)
  • 33
    • 84859758214 scopus 로고    scopus 로고
    • Hitachi advances paper-thin RFID chip
    • Y. Hara. (2006). Hitachi advances paper-thin RFID chip. EE Times [Online]. Available: http://www.eetimes.com/electronics-news/4058371/Hitachi- advances-paper-thin-RFID-chip
    • (2006) EE Times
    • Hara, Y.1
  • 34
    • 0001086601 scopus 로고    scopus 로고
    • New process scheme for wafer thinning and stress-free separation of ultrathin ICs
    • C. Landesberger, S. Scherbaum, G. Schwinn, and H. Spöhrle, "New process scheme for wafer thinning and stress-free separation of ultrathin ICs," in Proc. Microsyst. Technol., 2001, pp. 431-436.
    • (2001) Proc. Microsyst. Technol. , pp. 431-436
    • Landesberger, C.1    Scherbaum, S.2    Schwinn, G.3    Spöhrle, H.4
  • 35
    • 33744530680 scopus 로고    scopus 로고
    • Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
    • May
    • S. Mack, M. Meitl, A. Baca, Z. T. Zhu, and J. Rogers, "Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers," Appl. Phys. Lett., vol. 88, no. 21, pp. 213101-1-213101-3, May 2006.
    • (2006) Appl. Phys. Lett. , vol.88 , Issue.21 , pp. 2131011-2131013
    • MacK, S.1    Meitl, M.2    Baca, A.3    Zhu, Z.T.4    Rogers, J.5
  • 40
    • 50549083446 scopus 로고    scopus 로고
    • Systems-infoil -devices, fabrication processes and reliability issues
    • Sep.
    • J. Van den Brand, J. de Baets, T. van Mol, and A. Dietzel, "Systems-infoil -devices, fabrication processes and reliability issues," Microelectron. Rel., vol. 48, nos. 8-9, pp. 1123-1128, Sep. 2008.
    • (2008) Microelectron. Rel. , vol.48 , Issue.8-9 , pp. 1123-1128
    • Brand Den J.Van1    De Baets, J.2    Van Mol, T.3    Dietzel, A.4
  • 41
    • 84859764293 scopus 로고    scopus 로고
    • Product Strategy for Advanced Semiconductor Assembly Automation
    • Product Strategy for Advanced Semiconductor Assembly Automation
  • 42
    • 84859764294 scopus 로고    scopus 로고
    • [Online]. Available: http://www.kevinkennedyassociates.com
  • 44
    • 34248678726 scopus 로고    scopus 로고
    • Processing benefits of high repetition rate and high average power 355 nm laser for micromachining of microelectronics packaging materials
    • Jan.
    • R. Patel and J. Bovatsek, "Processing benefits of high repetition rate and high average power 355 nm laser for micromachining of microelectronics packaging materials," Proc. SPIE: Laser-Based Micro-Nanopackag. Assembly, vol. 6419, p. 64590H, Jan. 2007.
    • (2007) Proc. SPIE: Laser-Based Micro-Nanopackag. Assembly , vol.6419
    • Patel, R.1    Bovatsek, J.2
  • 45
    • 0002712326 scopus 로고    scopus 로고
    • Advanced substrate and packaging technology
    • Apr.
    • T. Ishida, "Advanced substrate and packaging technology," in Proc. 2nd IEMT/IMC Symp., Apr. 1998, pp. 18-24.
    • (1998) Proc. 2nd IEMT/IMC Symp. , pp. 18-24
    • Ishida, T.1
  • 47
    • 84876524074 scopus 로고    scopus 로고
    • A comparison of the stud bumping performance of 4N and 2N gold wire
    • Singapore
    • C. H. H. T. C. Wei, K. Dittmer, C. Breach, and F. Wulff, "A comparison of the stud bumping performance of 4N and 2N gold wire," in Proc. SEMICON Conf., Singapore, 2003.
    • (2003) Proc. SEMICON Conf.
    • Wei, C.H.H.T.C.1    Dittmer, K.2    Breach, C.3    Wulff, F.4
  • 48
    • 10244239258 scopus 로고    scopus 로고
    • Reliability analysis and design for the fine-pitch flip chip BGA packaging
    • Dec.
    • C. T. Peng, C. M. Liu, J. C. Lin, H. C. Cheng, and K. N. Chiang, "Reliability analysis and design for the fine-pitch flip chip BGA packaging," IEEE Trans. Comp. Packag. Technol., vol. 27, no. 4, pp. 684-693, Dec. 2004.
    • (2004) IEEE Trans. Comp. Packag. Technol. , vol.27 , Issue.4 , pp. 684-693
    • Peng, C.T.1    Liu, C.M.2    Lin, J.C.3    Cheng, H.C.4    Chiang, K.N.5
  • 49
    • 0034348026 scopus 로고    scopus 로고
    • Development and structuring of combined positive-negative/negative- positive resists using laser ablation as positive dry etching technique
    • Nov.
    • T. Lippert, J. Wei, A. Wokaun, N. Hoogen, and O. Nuyken, "Development and structuring of combined positive-negative/negative- positive resists using laser ablation as positive dry etching technique," Macromol. Mater. Eng., vol. 283, no. 1, pp. 140-143, Nov. 2000.
    • (2000) Macromol. Mater. Eng. , vol.283 , Issue.1 , pp. 140-143
    • Lippert, T.1    Wei, J.2    Wokaun, A.3    Hoogen, N.4    Nuyken, O.5
  • 52
    • 0000986523 scopus 로고
    • Photochemical cleavage of a polymeric solid: Details of the ultraviolet laser ablation of poly(methyl methacrylate) at 193 nm and 248 nm
    • Mar.
    • R. Srinivasan, B. Braren, D. Seeger, and R. Dreyfus, "Photochemical cleavage of a polymeric solid: Details of the ultraviolet laser ablation of poly(methyl methacrylate) at 193 nm and 248 nm," Macromolecules, vol. 19, no. 3, pp. 916-921, Mar. 1986.
    • (1986) Macromolecules , vol.19 , Issue.3 , pp. 916-921
    • Srinivasan, R.1    Braren, B.2    Seeger, D.3    Dreyfus, R.4
  • 53
    • 84859758219 scopus 로고    scopus 로고
    • Excimer laser ablation of high aspect ratio microvias using novel sensitizer-enhanced photopolymer
    • Apr. to be published
    • F. Sarwar, Z. Chen, J. Wu, D. Webster, and V. Marinov, "Excimer laser ablation of high aspect ratio microvias using novel sensitizer-enhanced photopolymer," J. Microelectron. Electron. Packag., Apr. 2011, to be published.
    • (2011) J. Microelectron. Electron. Packag.
    • Sarwar, F.1    Chen, Z.2    Wu, J.3    Webster, D.4    Marinov, V.5
  • 55
    • 33747366951 scopus 로고    scopus 로고
    • Laser propulsion of microelectronic components: Releasing mechanism investigation
    • N. Karlitskaya, J. Meijer, D. de Lange, and H. Kettelarij, "Laser propulsion of microelectronic components: Releasing mechanism investigation," in Proc. High-Power Laser Ablation VI, Taos, NM, 2006, pp. 62612P-1-62612P-10.
    • (2006) Proc. High-Power Laser Ablation , vol.6
    • Karlitskaya, N.1    Meijer, J.2    De Lange, D.3    Kettelarij, H.4
  • 56
    • 0141489665 scopus 로고    scopus 로고
    • Laser processes for MEMS manufacture
    • Feb.
    • A. Holmes, "Laser processes for MEMS manufacture," RIKEN Rev., vol. 43, pp. 63-69, Feb. 2002.
    • (2002) RIKEN Rev. , vol.43 , pp. 63-69
    • Holmes, A.1
  • 57
    • 0032304202 scopus 로고    scopus 로고
    • Sacrificial layer process with laser-driven release for batch assembly operations
    • Dec.
    • A. Holmes and S. Saidam, "Sacrificial layer process with laser-driven release for batch assembly operations," J. Microelectromech. Syst., vol. 7, no. 4, pp. 416-422, Dec. 1998.
    • (1998) J. Microelectromech. Syst. , vol.7 , Issue.4 , pp. 416-422
    • Holmes, A.1    Saidam, S.2
  • 60
    • 69949143841 scopus 로고    scopus 로고
    • Use of laser direct-write in microelectronics assembly
    • S. Mathews, R. Auyeung, and A. Piqué, "Use of laser direct-write in microelectronics assembly," JLMN-J. Laser Micro/Nanoeng., vol. 2, no. 1, pp. 103-107, 2007.
    • (2007) JLMN-J. Laser Micro/Nanoeng. , vol.2 , Issue.1 , pp. 103-107
    • Mathews, S.1    Auyeung, R.2    Piqué, A.3
  • 61
    • 33846379626 scopus 로고    scopus 로고
    • Laser forward transfer of electronic and power generating materials
    • C. Phipps, Ed. New York: Springer Verlag
    • A. Piqué, H. Kim, and C. Arnold, "Laser forward transfer of electronic and power generating materials," in Laser Ablation and Its Applications, C. Phipps, Ed. New York: Springer-Verlag, 2007, pp. 339-373.
    • (2007) Laser Ablation and Its Applications , pp. 339-373
    • Piqué, A.1    Kim, H.2    Arnold, C.3
  • 63
    • 77954887639 scopus 로고    scopus 로고
    • Laser printing of multilayered polymer/metal heterostructures for electronic and MEMS devices
    • Jun.
    • A. J. Birnbaum, H. Kim, N. A. Charipar, and A. Pique, "Laser printing of multilayered polymer/metal heterostructures for electronic and MEMS devices," Appl. Phys. A, vol. 99, no. 4, pp. 711-716, Jun. 2010.
    • (2010) Appl. Phys. A , vol.99 , Issue.4 , pp. 711-716
    • Birnbaum, A.J.1    Kim, H.2    Charipar, N.A.3    Pique, A.4
  • 64
    • 84859758222 scopus 로고    scopus 로고
    • Noncontact selective laser-assisted transfer of thinned semiconductor dice using a two-part dynamic releasing layer
    • to be published
    • R. Miller, V. R. Marinov, O. Swenson, Z. Chen, and M. Semler, "Noncontact selective laser-assisted transfer of thinned semiconductor dice using a two-part dynamic releasing layer," IEEE Trans. Comp., Packag., Manuf. Technol., to be published.
    • IEEE Trans. Comp., Packag., Manuf. Technol.
    • Miller, R.1    Marinov, V.R.2    Swenson, O.3    Chen, Z.4    Semler, M.5
  • 66
    • 70349929676 scopus 로고    scopus 로고
    • Simple, inexpensive, and reliable high density interconnect technology for flexible electronics applications
    • Phoenix, AZ
    • S. Bhattacharya and V. Marinov, "Simple, inexpensive, and reliable high density interconnect technology for flexible electronics applications," presented at the 8th Flexible Electronics & Displays Conference, Phoenix, AZ, 2009.
    • (2009) 8th Flexible Electronics & Displays Conference
    • Bhattacharya, S.1    Marinov, V.2
  • 67
    • 79952438065 scopus 로고    scopus 로고
    • Flexible embedded circuitry: A novel process for high density, cost effective electronics
    • Oct.
    • J. Van den Brand, R. Kusters, M. Barink, and A. Dietzel, "Flexible embedded circuitry: A novel process for high density, cost effective electronics," Microelectron. Eng., vol. 87, no. 10, pp. 1861-1867, Oct. 2010.
    • (2010) Microelectron. Eng. , vol.87 , Issue.10 , pp. 1861-1867
    • Brand Den J.Van1    Kusters, R.2    Barink, M.3    Dietzel, A.4
  • 68
    • 84859758221 scopus 로고    scopus 로고
    • Conductive adhesives from low-VOC silver inks for advanced microelectronics applications
    • Jan.
    • S. Datta, K. Keller, D. L. Schulz, and D. C. Webster, "Conductive adhesives from low-VOC silver inks for advanced microelectronics applications," IEEE Trans. Comp., Packag. Manuf. Technol., vol. 1, no. 1, pp. 69-75, Jan. 2011.
    • (2011) IEEE Trans. Comp., Packag. Manuf. Technol. , vol.1 , Issue.1 , pp. 69-75
    • Datta, S.1    Keller, K.2    Schulz, D.L.3    Webster, D.C.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.