Laser propulsion of microelectronic components: Releasing mechanism investigation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6261 II, Issue , 2006, Pages

  Karlitskaya, Natallia S ^a   Meijer, Johan ^a   De Lange, Dirk F ^a   Kettelarij, Henk ^b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Laser propulsion; Releasing; Silicon processing; Transferring

Indexed keywords

MICROELECTRONICS; POLYMERS; PROPULSION; SATELLITES; THERMAL EFFECTS;

LASER PROPULSION; RELEASING; SILICON PROCESSING; TRANSFERRING;

LASER APPLICATIONS;

EID: 33747366951     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.673815     Document Type: Conference Paper

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