Study of laser die release by Q-switched Nd: YAG laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5448, Issue PART 2, 2004, Pages 935-943

  Karlitskaya, Natallia S ^a   De Lange, Dirk F ^a   Sanders, Rene ^b   Meijer, Johan ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Laser transfer; Microelectronics assembly

Indexed keywords

INTEGRATED CIRCUITS; LASER BEAM EFFECTS; LASER BEAMS; MICROELECTRONICS; MONOMERS; PLASMA SIMULATION; POLYMERIZATION; POLYVINYL CHLORIDES; Q SWITCHED LASERS; SEMICONDUCTOR MATERIALS;

LASER DIE TRANSFER; LASER TRANSFER; MICROELECTRONICS ASSEMBLY; SILICON DIES;

LASER PULSES;

EID: 12144284638     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.546674     Document Type: Conference Paper

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