Nanoscale characterization of different stiction mechanisms in electrostatically driven MEMS devices based on adhesion and friction measurements

Journal of Colloid and Interface Science

Volumn 358, Issue 1, 2011, Pages 1-13

  Zaghloul, U ^a,b,c   Bhushan, B ^c   Pons, P ^a,b   Papaioannou, G J ^a,b,d   Coccetti, F ^a,b,e   Plana, R ^a,b  

^a LAAS CNRS   (France)

^b INSA   (France)

^c OHIO STATE UNIVERSITY   (United States)

^d UNIVERSITY OF ATHENS   (Greece)

^e Novamems   (France)

Author keywords

Adhesion and friction; Dielectric charging; Electrostatic actuation; Field induced meniscus; Force distance measurements; Nanoscale characterization; RF MEMS switch; Stiction

Indexed keywords

DIELECTRIC CHARGING; ELECTROSTATIC ACTUATION; FIELD-INDUCED MENISCUS; FORCE-DISTANCE MEASUREMENTS; NANOSCALE CHARACTERIZATION; RF-MEMS SWITCH;

ADHESION; ATMOSPHERIC HUMIDITY; DIELECTRIC DEVICES; DIELECTRIC FILMS; ELECTROMAGNETIC INDUCTION; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; TIME SWITCHES; TRIBOLOGY;

STICTION;

ADHESION; ARTICLE; ATOMIC FORCE MICROSCOPY; DIELECTRIC CONSTANT; FRICTION; HUMIDITY; MECHANICAL STRESS; MICROELECTROMECHANICAL SYSTEM; NANOANALYSIS; PRIORITY JOURNAL; RADIOFREQUENCY; SIMULATION;

EID: 79953316264     PISSN: 00219797     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcis.2011.03.005     Document Type: Article

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