Effect of humidity on dielectric charging process in electrostatic capacitive RF MEMS switches based on Kelvin Probe Force Microscopy surface potential measurements

Materials Research Society Symposium Proceedings

Volumn 1222, Issue , 2010, Pages 39-44

  Zaghloul, U ^a,b   Papaioannou, G J ^a,c   Coccetti, F ^a,d   Pons, P ^a   Plana, R ^a,b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ PAUL SABATIER   (France)

^c UNIVERSITY OF ATHENS   (Greece)

^d Novamems   (France)

Author keywords

Dielectric charging; Humidity; Kelvin probe force microscopy; Silicon nitride

Indexed keywords

AFM TIP; ASSESSMENT PROCEDURE; BIAS LEVELS; BIAS POLARITY; CAPACITIVE RF MEMS SWITCH; CHARGING/DISCHARGING; DIELECTRIC CHARGING; HUMIDITY; INJECTION DURATIONS; KELVIN PROBE FORCE MICROSCOPY; MEMSDEVICES; PECVD SILICON NITRIDE; RELATIVE HUMIDITIES; SIN FILMS; SURFACE POTENTIAL MEASUREMENTS;

COMPOSITE MICROMECHANICS; DIELECTRIC FILMS; ELECTRIC CHARGE; ELECTRIC SWITCHES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MEMS; MICROELECTROMECHANICAL DEVICES; PROBES; SILICON NITRIDE; SURFACE POTENTIAL; SURFACE PROPERTIES;

ATMOSPHERIC HUMIDITY;

EID: 77955932755     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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