Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 753-756

  Yuan, Xiaobin ^a,b   Hwang, James C M ^a,b   Forehand, David ^a,c   Goldsmith, Charles L ^a,c  

^a IEEE   (United States)

^b LEHIGH UNIVERSITY   (United States)

^c MEMtronics Inc   (United States)

Author keywords

Charging; MEMS; RF; Switch, dielectric; Trap

Indexed keywords

CONTROL VOLTAGE; MEMS; RF; SWITCH, DIELECTRIC;

CAPACITORS; CHARGING (BATTERIES); DENSITY (SPECIFIC GRAVITY); ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; MATHEMATICAL MODELS;

DIELECTRIC MATERIALS;

EID: 33646069253     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516721     Document Type: Conference Paper

References (4)

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2. X. Yuan, S. V. Cherepko, J. C. M. Hwang, C. L. Goldsmith, C. Nordquist, and C. Dyck, "Initial observation and analysis of dielectric-charging effects on RF MEMS capacitive switches," in IEEE MTT-S Dig., 2004, pp. 1943-1946.
3. W. M. van Spengen, R. Puers, R. Mertens, and I. De Wolf, "A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches," J. Micromechanics Microengineering, vol. 14, pp. 514-521, Jan. 2004.
4. H. Matsuura, M. Yoshimoto and H. Matsunami, "Discharging current transient spectroscopy for evaluating traps in insulators," Japanese J. Appl. Phys., vol. 34, pp. L185-L187, Feb. 1995.