High-cycle life testing of RF MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 1805-1808

  Goldsmith, C L ^a   Forehand, D I ^a   Peng, Z ^b   Hwang, J C M ^b   Ebel, John L ^c  

^a MEMtronics Inc   (United States)

^b LEHIGH UNIVERSITY   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Dielectric charging; MEMS switches; Reliability; RF MEMS

Indexed keywords

MEMS; RELIABILITY; SILICA;

CAPACITIVE SWITCHES; DIELECTRIC CHARGING; MEMS SWITCHES; RF MEMS;

ELECTRIC SWITCHES;

EID: 34748830320     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380099     Document Type: Conference Paper

References (8)

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2. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, "Lifetime Characterization Of Capacitive RE MEMS Switches," 2001 IEEE Int. Microwave Symp. Dig., vol. 1, pp. 227-230, May 2001.
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8. J.F. Kucko, J.C. Petrosky, J.R. Reid, and Y.K. Yeo, "Non-Charge Related Mechanism Affecting Capacitive MEMS Switch Lifetime," IEEE Microwave Wireless Comp. Lett, vol. 16, No. 3, pp. 140-142, Mar. 2006.