Lifetime characterization of capacitive RF MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2001, Pages 227-230

  Goldsmith, C ^a   Ehmke, J ^a   Malczewski, A ^a   Pillans, B ^a   Eshelman, S ^a   Yao, Z ^a   Brank, J ^a   Eberly, M ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DIELECTRIC MATERIALS; ELECTRIC CHARGE; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; PERMITTIVITY; TEMPERATURE; THICKNESS MEASUREMENT; TIME DOMAIN ANALYSIS;

ACTUATION VOLTAGE; DIELECTRIC CHARGING; DUAL PULSE WAVEFORM; LIFETIME CHARACTERIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0035695312     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. X-band RF MEMS phase shifters for phased array applications
2. Ka-band RF MEMS phase shifters
3. Performance of low-loss RF MEMS capacitive switches