ESD failure signature in capacitive RF MEMS switches

Microelectronics Reliability

Volumn 48, Issue 8-9, 2008, Pages 1237-1240

  Ruan, J ^a,b   Papaioannou, G J ^a,c   Nolhier, N ^a,b   Mauran, N ^a   Bafleur, M ^a,b   Coccetti, F ^a   Plana, R ^a,b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

^c UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; ELECTROMAGNETISM; ELECTROSTATIC DISCHARGE; INDUCTANCE; KETONES; MAGNETISM; MEMS; MICROELECTROMECHANICAL DEVICES; SULFATE MINERALS;

DIELECTRIC CHARGING; ELECTRICAL ARCING; ELECTRICAL DISCHARGES; FAILURE CRITERIA; HIGH ELECTRIC FIELDS; INDUCED CHARGES; PARAMETER SHIFTS; RF MEMS; RF-MEMS SWITCHES; TRANSIENT VOLTAGES; TRANSMISSION LINE PULSING;

ELECTROSTATIC DEVICES;

EID: 50249138208     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2008.06.035     Document Type: Article

References (14)

1. Rebeiz G. RF MEMS - theory, design, and technology (2003), Wiley
2. Ngugen C.T.-C. Integrated micromechanical circuits for RF front ends (2006), IEEE
3. Merlijn van Spengen W., et al. A comprehensive model to predict the charging and the reliability of capacitive RF MEMS switches. J Micromech Microeng 14 (2004) 514-521
4. Voldman S.H. ESD - RF technology and circuits (2006), Wiley
5. Yuan X., et al. Acceleration of dielectric charging in RF MEMS capacitive switches. IEEE Trans Dev Mater Reliab 6 N°4 (2006) 556-563
6. Czarnecki P., et al. Effect of gas pressure on the lifetime of capacitive RF MEMS switches. IEEE MEMS January (2006) 890-893
7. Wibbeler J., et al. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS). Sensors Actuators A71 (1998) 74-80
8. Paschen F. Wied Ann 37 (1889) 69-96
9. Townsend J.S. J Franklin Inst 200 (1925) 563
10. Schaffert R.M. Electrophotography (1975), Wiley and Sons, New York p. 516-7
11. Dhariwal R.S., et al. Electric field breakdown at micrometer separations in air and nitrogen at atmospheric pressure. IEE Proc Sci Meas Technol 147 (2000) 261-265
12. Ruan J., et al. Electrostatic discharge failure analysis of capacitive RF MEMS switches. Microelectron Reliab 47 (2007) 1818-1822
13. Papaioannou GJ et al., Contactless dielectric charging mechanisms in RF-MEMS capacitive switches. In: Proceedings of the EuMA 2006.
14. Salvino D.J., Rogge S., Tigner B., and Osheroff D.D. Low temperature ac dielectric response of glasses to high dc electric fields. Phys Rev Lett 73 (1994) 268-271