Effect of substrate charging on the reliability of capacitive RF MEMS switches

Sensors and Actuators, A: Physical

Volumn 154, Issue 2, 2009, Pages 261-268

  Czarnecki, P ^a,b   Rottenberg, X ^a,b   Soussan, P ^a   Ekkels, P ^a,b   Muller, P ^a   Nolmans, P ^a   De Raedt, W ^a   Tilmans, H A C ^a   Puers, R ^b   Marchand, L ^c   De Wolf, I ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

Capacitive RF MEMS switch; Reliability; Substrate charging

Indexed keywords

ACTUATION VOLTAGES; CAPACITIVE RF MEMS SWITCH; DIFFERENT SUBSTRATES; ENVIRONMENTAL CONDITIONS; FAILURE MECHANISM; PULL-IN; PULL-IN VOLTAGE; SUBSTRATE CHARGING;

ELECTRIC POTENTIAL; MEMS; MICROELECTROMECHANICAL DEVICES; RELIABILITY; SWITCHES; TIME SWITCHES;

SUBSTRATES;

EID: 69549087034     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.07.003     Document Type: Article

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