The influence of the package environment on the functioning and reliability of RF-MEMS switches

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 337-341

  Van Spengen, W Merlijn ^b   Czarnecki, Piotr ^a   Puers, Robert ^c   Van Beek, Joost T M ^d   De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

^b LEIDEN UNIVERSITY   (Netherlands)

^c UNIVERSITY OF LEUVEN   (Belgium)

^d PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Capacitive switch; Environment; Packaging; Pressure; Reliability; RF MEMS

Indexed keywords

CAPACITIVE SWITCHES; CHARGE TRAPPING; ENVIRONMENT; RF-MEMS;

ATMOSPHERIC HUMIDITY; CAPACITANCE; ELECTRIC CHARGE; ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; NITROGEN; PRESSURE; RELIABILITY; SWITCHING;

ELECTRIC SWITCHES;

EID: 28744450605     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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