Top vs. bottom charging of the dielectric in RF MEMS capacitive switches

Asia-Pacific Microwave Conference Proceedings, APMC

Volumn 3, Issue , 2006, Pages 1535-1538

  Peng, Zhen ^a   Yuan, Xiaobin ^a   Hwang, James C M ^a   Forehand, David ^b   Goldsmith, Charles L ^b  

^a LEHIGH UNIVERSITY   (United States)

^b MEMtronics Inc   (United States)

Author keywords

Charging; Dielectric; RF MEMS; Switch; Trap

Indexed keywords

ENERGY STORAGE; METALLIZING; MICROWAVES; TIME SWITCHES;

ASIA PACIFIC; CHARGING (MATERIALS); CONFERENCE PROCEEDINGS; RF MEMS CAPACITIVE SWITCHES;

ELECTRIC SWITCHES;

EID: 44949239556     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMC.2006.4429698     Document Type: Conference Paper

References (16)

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