Study of residual charging in dielectric less capacitive MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2008, Pages 33-36

  Mardivirin, D ^a   Bouyge, D ^a   Crunteanu, A ^a   Pothier, A ^a   Blondy, P ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

Capacitive switches; Reliability; RF MEMS

Indexed keywords

ELECTRIC SWITCHES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; RELIABILITY;

CAPACITIVE SWITCHES; DIELECTRIC CHARGING; MEMS SWITCHES; PULL IN; RESIDUAL CHARGING; RF-MEMS; VOLTAGE SHIFTS;

SWITCHES;

EID: 57349141576     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2008.4633096     Document Type: Conference Paper

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