Adhesion and friction studies of silicon and hydrophobic and low friction films and investigation of scale effects

Journal of Tribology

Volumn 126, Issue 3, 2004, Pages 583-590

  Bhushan, Bharat ^a   Liu, Huiwen ^a   Hsu, Stephen M ^b  

^a OHIO STATE UNIVERSITY   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Adhesion; Friction; Hydrophobic films; Lubricant films; MEMS NEMS; Scale dependence; Silicon

Indexed keywords

ADHESION; CARBON; CHEMICAL BONDS; FRICTION; MICROELECTROMECHANICAL DEVICES; SILICON; SOLID LUBRICANTS;

DIAMOND LIKE CARBONS (DLC); NANOELECTROMECHANICAL SYSTEMS; SOLID FILMS;

TRIBOLOGY;

ADHESION; ELECTROMECHANICAL EQUIPMENT; FILM LUBRICANT; FRICTION; HYDROPHOBICITY; TRIBOLOGY;

EID: 3543028609     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1739407     Document Type: Article

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