Infrared birefringence imaging of residual stress and bulk defects in multicrystalline silicon

Journal of Applied Physics

Volumn 108, Issue 6, 2010, Pages

  Ganapati, Vidya ^a   Schoenfelder, Stephan ^a,b,c   Castellanos, Sergio ^a   Oener, Sebastian ^d   Koepge, Ringo ^b,c   Sampson, Aaron ^a   Marcus, Matthew A ^e   Lai, Barry ^f   Morhenn, Humphrey ^d   Hahn, Giso ^d   Bagdahn, Joerg ^b   Buonassisi, Tonio ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b FRAUNHOFER CENTER FOR SILICON PHOTOVOLTAICS CSP   (Germany)

^c FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

^d UNIVERSITY OF KONSTANZ   (Germany)

^e LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^f ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE IMAGING; BULK DEFECTS; CELL MANUFACTURING; CONTROL TECHNIQUES; INDUSTRIAL SOLAR CELLS; INTERNAL STRESS; LOCAL STRESS; MECHANICAL STRENGTH; METAL PRECIPITATION; MICRO-DEFECTS; MINORITY CARRIER LIFETIMES; MULTI-CRYSTALLINE SILICON; MULTICRYSTALLINE SILICON (MC-SI); SI SOLAR CELLS; SOLAR CELL MATERIALS; STRESS MAGNITUDE;

BIREFRINGENCE; CARRIER LIFETIME; DEFECTS; GRAIN BOUNDARIES; MANUFACTURE; POLYSILICON; PRECIPITATION (CHEMICAL); RESIDUAL STRESSES; SILICON CARBIDE; SOLAR CELLS; TRANSITION METALS;

SILICON WAFERS;

EID: 77957735395     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3468404     Document Type: Article

References (124)

1. T. Surek, Third World Conference on Photovoltaic Energy Conversion (IEEE, Osaka, Japan, 2003), Vol. 3, p. 2507.
2. T. Trupke, R. A. Bardos, M. C. Schubert, and W. Warta, Appl. Phys. Lett. APPLAB 0003-6951 89, 044107 (2006). 10.1063/1.2234747 (Pubitemid 44147627)
3. T. Trupke, R. A. Bardos, M. D. Abbott, P. Würfel, E. Pink, Y. Augarten, F. W. Chen, K. Fisher, J. E. Cotter, M. Kasemann, M. Rüdiger, S. Kontermann, M. C. Schubert, M. The, S. W. Glunz, W. Warta, D. Macdonald, J. Tan, A. Cuevas, J. Bauer, R. Gupta, O. Breitenstein, T. Buonassisi, G. Tarnowski, A. Lorenz, H. P. Hartmann, D. H. Neuhaus, and J. M. Fernandez, 22nd European Photovoltaic Solar Energy Conference and Exhibition (WIP-Munich, Milan, Italy, 2007).
4. T. Fuyuki, H. Kondo, T. Yamazaki, Y. Takahashi, and Y. Uraoka, Appl. Phys. Lett. APPLAB 0003-6951 86, 262108 (2005). 10.1063/1.1978979 (Pubitemid 40983206)
5. M. Kasemann, W. Kwapil, B. Walter, J. Giesecke, B. Michl, M. The, J. -M. Wagner, J. Bauer, A. Schütt, J. Carstensen, H. Kampwerth, P. Gundel, M. C. Schubert, R. A. Bardos, H. Föll, H. Nagel, P. Würfel, T. Trupke, O. Breitenstein, W. Warta, and S. W. Glunz, Proceedings of the 23rd European Photovoltaic Solar Energy Conference (WIP-Munich, Valencia, Spain, 2008).
6. O. Breitenstein, J. P. Rakotoniaina, and M. H. Al Rifai, Prog. Photovoltaics PPHOED 1062-7995 11, 515 (2003). 10.1002/pip.520
7. J. Isenberg and W. Warta, J. Appl. Phys. JAPIAU 0021-8979 95, 5200 (2004). 10.1063/1.1690103
8. M. Kaes, S. Seren, T. Pernau, and G. Hahn, Prog. Photovoltaics PPHOED 1062-7995 12, 355 (2004). 10.1002/pip.555
9. H. Nagel, A. G. Aberle, and S. Narayanan, Solid State Phenom. DDBPE8 1012-0394 67-68, 503 (1999). 10.4028/www.scientific.net/SSP.67-68.503
10. J. Isenberg, J. Dicker, and W. Warta, J. Appl. Phys. JAPIAU 0021-8979 94, 4122 (2003). 10.1063/1.1602948
11. M. C. Schubert and W. Warta, Prog. Photovoltaics PPHOED 1062-7995 15, 331 (2007). 10.1002/pip.738
12. K. Ramspeck, K. Bothe, J. Schmidt, and R. Brendel, J. Mater. Sci.: Mater. Electron. JSMEEV 0957-4522 19, 4 (2008). 10.1007/s10854-008-9671-8
13. W. Weibull, ASME J. Appl. Mech. JAMCAV 0021-8936 18, 293 (1951).
14. C. Funke, E. Kullig, M. Kuna, and H. J. Möller, Adv. Eng. Mater. AENMFY 1438-1656 6, 594 (2004). 10.1002/adem.200400406
15. S. Schoenfelder, M. Ebert, C. Landesberger, K. Bock, and J. Bagdahn, Microelectron. Reliab. MCRLAS 0026-2714 47, 168 (2007). 10.1016/j.microrel.2006. 09.002 (Pubitemid 46177065)
16. K. Wasmer, A. Bidiville, J. Michler, C. Ballif, M. d. Meer, and P. Nasch, 22nd European Photovoltaic Solar Energy Conference (WIP-Munich, Milan, Italy, 2007).
17. P. Rupnowski and B. Sopori, Int. J. Fract. IJFRAP 0376-9429 155, 67 (2009). 10.1007/s10704-009-9324-9
18. W. P. Mulligan, M. A. Carandang, M. Dawson, D. M. D. Ceuster, C. N. Stone, and R. M. Swanson, 21st European Photovoltaic Solar Energy Conference and Exhibition (WIP-Munich, Dresden, Germany, 2007).
19. W. Koch, A. L. Endrös, D. Franke, C. HäΒler, J. P. Kalejs, and H. J. Möller, in Handbook of Photovoltaic Science and Engineering, edited by, A. Luque, and, S. Hegedus, (John Wiley & Sons Ltd., England, 2003).
20. J. I. Hanoka, Sol. Energy Mater. Sol. Cells SEMCEQ 0927-0248 65, 231 (2001). 10.1016/S0927-0248(00)00154-9
21. G. Hahn and A. Schönecker, J. Phys.: Condens. Matter JCOMEL 0953-8984 16, R1615 (2004). 10.1088/0953-8984/16/50/R03 (Pubitemid 40025645)
22. R. G. Seidensticker and R. H. Hopkins, J. Cryst. Growth JCRGAE 0022-0248 50, 221 (1980). 10.1016/0022-0248(80)90246-8
23. S. L. Morelhão and S. Mahajan, J. Cryst. Growth JCRGAE 0022-0248 177, 41 (1997). 10.1016/S0022-0248(96)00809-3
24. S. R. Lederhandler, J. Appl. Phys. JAPIAU 0021-8979 30, 1631 (1959). 10.1063/1.1735026
25. B. K. Tanner and D. J. Fathers, Philos. Mag. PMHABF 1478-6435 29, 1081 (1974). 10.1080/14786437408226593
26. N. -B. Ming and C. -Z. Ge, J. Cryst. Growth JCRGAE 0022-0248 99, 1309 (1990). 10.1016/S0022-0248(08)80126-1
27. R. W. Davidge and P. L. Pratt, Phys. Status Solidi PHSSAK 0031-8957 6, 759 (1964). 10.1002/pssb.19640060315
28. S. Mendelson, J. Appl. Phys. JAPIAU 0021-8979 33, 2175 (1962). 10.1063/1.1728923
29. A. S. Argon, A. K. Nigam, and G. E. Padawer, Philos. Mag. PMHABF 1478-6435 25, 1095 (1972). 10.1080/14786437208226855
30. J. F. Nye, Proc. R. Soc. London, Ser. A PRLAAZ 0950-1207 198, 190 (1949). 10.1098/rspa.1949.0094
31. J. F. Nye, Proc. R. Soc. London, Ser. A PRLAAZ 0950-1207 200, 47 (1949). 10.1098/rspa.1949.0158
32. A. S. Argon and E. Orowan, Philos. Mag. PMHABF 1478-6435 9, 1003 (1964). 10.1080/14786436408211911
33. J. Hilgarth, J. Mater. Sci. JMTSAS 0022-2461 13, 2697 (1978). 10.1007/BF02402758
34. G. Kloess, M. Laasch, R. Schwarz, and K. W. Benz, J. Cryst. Growth JCRGAE 0022-0248 146, 130 (1995). 10.1016/0022-0248(94)00524-9
35. P. Dobrilla and J. S. Blakemore, J. Appl. Phys. JAPIAU 0021-8979 60, 169 (1986). 10.1063/1.337670
36. K. Maiwa, K. Tsukamoto, I. Sunagawa, C. -Z. Ge, and N. -B. Ming, J. Cryst. Growth JCRGAE 0022-0248 98, 590 (1989). 10.1016/0022-0248(89)90295-9 (Pubitemid 20645654)
37. C. -Z. Ge and H. -W. Wang, J. Appl. Phys. JAPIAU 0021-8979 74, 139 (1993). 10.1063/1.354146
38. J. W. Matthews and T. S. Plaskett, Phys. Status Solidi A PSSABA 0031-8965 37, 499 (1976). 10.1002/pssa.2210370218
39. F. Lihl, J. Tomiser, P. Skylicky, and M. Kuster, Z. Angew. Phys. ZAPHAX 0044-2283 32, 287 (1971).
40. E. Sachs, private communication (2008).
41. J. Pastrnak and K. Vedam, Phys. Rev. B PLRBAQ 0556-2805 3, 2567 (1971). 10.1103/PhysRevB.3.2567
42. T. Chu, M. Yamada, J. Donecker, M. Rossberg, V. Alex, and H. Riemann, Microelectron. Eng. MIENEF 0167-9317 66, 327 (2003). 10.1016/S0167-9317(02) 00935-8
43. M. C. Brito, J. M. Alves, J. M. Serra, R. M. Gamboa, C. Pinto, and A. M. Vallera, Rev. Sci. Instrum. RSINAK 0034-6748 76, 013901 (2005). 10.1063/1.1823654 (Pubitemid 40211517)
44. M. Fukuzawa and M. Yamada, Mater. Sci. Semicond. Process. MSSPFQ 1369-8001 9, 266 (2006). 10.1016/j.mssp.2006.01.043
45. F. Li, V. Garcia, and S. Danyluk, Proceedings of the Fourth World Conference on Photovoltaic Energy Conversion, (IEEE, Kona, Hawaii, 2006), p. 1245.
46. T. Buonassisi, S. Reitsma, R. Sweeney, M. D. Pickett, W. Huang, J. Lesniak, and M. L. Spencer, Proceedings of the 22nd European Photovoltaic Solar Energy Conference (WIP-Munich, Milan, Italy, 2007).
47. G. Horn, J. Lesniak, T. Mackin, and B. Boyce, Rev. Sci. Instrum. RSINAK 0034-6748 76, 045108 (2005). 10.1063/1.1884189 (Pubitemid 40565044)
48. M. Yamada, Rev. Sci. Instrum. RSINAK 0034-6748 64, 1815 (1993). 10.1063/1.1144016
49. F. Li, V. Garcia, S. Danyluk, S. Ostapenko, J. Kalejs, and D. Yates, Fourth World Conference on Photovoltaic Energy Conversion (IEEE, Waikoloa, USA, 2006), p. 1429.
50. J. Chen, B. Chen, T. Sekiguchi, M. Fukuzawa, and M. Yamada, Appl. Phys. Lett. APPLAB 0003-6951 93, 112105 (2008). 10.1063/1.2983649
51. A. Belyaev, O. Polupan, S. Ostapenko, D. Hess, and J. P. Kalejs, Semicond. Sci. Technol. SSTEET 0268-1242 21, 254 (2006). 10.1088/0268-1242/21/3/ 007 (Pubitemid 43254094)
52. H. Liang, Y. Pan, S. Zhao, G. Qin, and K. K. Chin, J. Appl. Phys. JAPIAU 0021-8979 71, 2863 (1992). 10.1063/1.351017
53. T. S. Horányi, T. Pavelka, and P. Tüttö, Appl. Surf. Sci. ASUSEE 0169-4332 63, 306 (1993). 10.1016/0169-4332(93)90112-O (Pubitemid 23599868)
54. F. J. Humphreys, J. Mater. Sci. JMTSAS 0022-2461 36, 3833 (2001). 10.1023/A:1017973432592 (Pubitemid 32820308)
55. D. G. Brandon, Acta Metall. AMETAR 0001-6160 14, 1479 (1966). 10.1016/0001-6160(66)90168-4
56. B. L. Sopori, Appl. Opt. APOPAI 0003-6935 27, 4676 (1988). 10.1364/AO.27.004676
57. Z. Cai, B. Lai, W. Yun, I. McNulty, A. Khounsary, J. Maser, P. Ilinski, D. Legnini, E. Trakhtenberg, S. Xu, B. Tieman, G. Wiemerslage, and E. Gluskin, AIP Conf. Proc. APCPCS 0094-243X 521, 31 (2000).
58. W. Yun, B. Lai, Z. Cai, J. Maser, D. Legini, E. Gluskin, Z. Chen, A. Krasnoperova, Y. Valdimirsky, F. Cerrina, E. D. Fabrizio, and M. Gentili, Rev. Sci. Instrum. RSINAK 0034-6748 70, 2238 (1999). 10.1063/1.1149744
59. M. A. Marcus, A. A. MacDowell, R. Celestre, E. Domning, K. Franck, A. Manceau, G. Morrison, T. Miller, H. A. Padmore, and R. E. Sublett, J. Synchrotron Radiat. JSYRES 0909-0495 11, 239 (2004). 10.1107/S0909049504005837 (Pubitemid 40087613)
60. S. A. McHugo, A. C. Thompson, C. Flink, E. R. Weber, G. Lamble, B. Gunion, A. MacDowell, R. Celestre, H. A. Padmore, and Z. Hussain, J. Cryst. Growth JCRGAE 0022-0248 210, 395 (2000). 10.1016/S0022-0248(99)00718-6 (Pubitemid 30559801)
61. T. Buonassisi, A. A. Istratov, M. A. Marcus, M. Heuer, M. D. Pickett, B. Lai, Z. Cai, S. M. Heald, and E. R. Weber, Solid State Phenom. DDBPE8 1012-0394 108-109, 577 (2005). 10.4028/www.scientific.net/SSP.108-109.577
62. J. C. Lambropoulos, J. W. Hutchinson, R. O. Bell, B. Chalmers, and J. P. Kalejs, J. Cryst. Growth JCRGAE 0022-0248 65, 324 (1983). 10.1016/0022-0248(83) 90068-4
63. T. Buonassisi, S. Reitsma, R. Sweeney, M. D. Pickett, W. Huang, J. Lesniak, and M. L. Spencer, 22nd European Photovoltaic Solar Energy Conference and Exhibition (WIP-Munich, Milan, Italy, 2007).
64. E. S. Meieran and I. A. Blech, J. Appl. Phys. JAPIAU 0021-8979 38, 3495 (1967). 10.1063/1.1710160
65. K. Hartman, M. Bertoni, J. Serdy, and T. Buonassisi, Appl. Phys. Lett. APPLAB 0003-6951 93, 122108 (2008). 10.1063/1.2990644
66. D. Franke, Third World Conference on Photovoltaic Energy Conversion (IEEE, Osaka, Japan, 2003).
67. D. Macdonald and A. Cuevas, Proceedings of the 16th European Photovoltaic Solar Energy Conference (WIP-Munich, Glasgow, UK, 2000), p. 1707.
68. J. W. Matthews, E. Klokholm, V. Sadagopan, T. S. Plaskett, and E. Mendel, Acta Metall. AMETAR 0001-6160 21, 203 (1973). 10.1016/0001-6160(73)90005-9
69. A. K. Søiland, E. J. vrelid, T. A. Engh, O. Lohne, J. K. Tuset, and. Gjerstad, Mater. Sci. Semicond. Process. MSSPFQ 1369-8001 7, 39 (2004). 10.1016/j.mssp.2004.05.001
70. J. -P. Rakotoniaina, O. Breitenstein, M. Werner, M. H. Al Rifai, T. Buonassisi, M. D. Pickett, M. Ghosh, A. Müller, and L. Q. Nam, Proceedings of the 20th European Photovoltaic Solar Energy Conference (WIP-Munich, Barcelona, Spain, 2005).
71. J. Bauer, O. Breitenstein, and J. -P. Rakotoniaina, Phys. Status Solidi A PSSABA 0031-8965 204, 2190 (2007). 10.1002/pssa.200675436 (Pubitemid 47182110)
72. G. Du, N. Chen, and P. Rossetto, Sol. Energy Mater. Sol. Cells SEMCEQ 0927-0248 92, 1059 (2008). 10.1016/j.solmat.2008.03.007
73. C. Reimann, M. Trempa, J. Friedrich, S. Würzner, and H. -J. Möller, Third International Workshop on Crystalline Silicon Solar Cells (NTNU/SINTEF, Trondheim, Norway, 2009).
74. H. -J. Möller, C. Funke, and S. Würzner, Third International Workshop on Crystalline Silicon Solar Cells (NTNU/SINTEF, Trondheim, Norway, 2009).
75. J. Samuels and S. G. Roberts, Proc. R. Soc. London, Ser. A PRLAAZ 0950-1207 421, 1 (1989). 10.1098/rspa.1989.0001
76. W. Voigt, Lehrbuch der Kristallphysik (Teubner Verlag, Leipzig, 1910).
77. J. J. Hall, Phys. Rev. PHRVAO 0031-899X 161, 756 (1967). 10.1103/PhysRev.161.756
78. S. He, T. Zheng, and S. Danyluk, J. Appl. Phys. JAPIAU 0021-8979 96, 3103 (2004). 10.1063/1.1774259
79. R. Hull, Properties of Crystalline Silicon (INSPEC, Exeter, UK, 1999).
80. J. F. Shackelford and W. Alexander, CRC Materials Science and Engineering Handbook, 3rd ed. (CRC, Boca Raton, FL, 2001).
81. Z. Li and R. C. Bradt, J. Mater. Sci. JMTSAS 0022-2461 21, 4366 (1986). 10.1007/BF01106557
82. M. Okaji, Int. J. Thermophys. IJTHDY 0195-928X 9, 1101 (1988). 10.1007/BF01133277
83. M. M'Hamdi and S. Gouttebroze, in 24th European Photovoltaic Solar Energy Conference (WIP-Munich, Hamburg, Germany, 2009), p. 1265.
84. S. Adachi, Handbook on Physical Properties of Semiconductors (Kluwer Academic, Boston, USA, 2004), Vol. 1.
85. K. Strössner, M. Cardona, and W. J. Choyke, Solid State Commun. SSCOA4 0038-1098 63, 113 (1987). 10.1016/0038-1098(87)91176-8 (Pubitemid 18605603)
86. W. A. Bassett, M. S. Weathers, T. -C. Wu, and T. Holmquist, J. Appl. Phys. JAPIAU 0021-8979 74, 3824 (1993). 10.1063/1.354476
87. M. Yoshida, A. Onodera, M. Ueno, K. Takemura, and O. Shimomura, Phys. Rev. B PLRBAQ 0556-2805 48, 10587 (1993). 10.1103/PhysRevB.48.10587
88. A. Lotnyk, J. Bauer, O. Breitenstein, and H. Blumtritt, Sol. Energy Mater. Sol. Cells SEMCEQ 0927-0248 92, 1236 (2008). 10.1016/j.solmat.2008.04.016
89. D. Hull and D. J. Bacon, Introduction to Dislocations, 4th ed. (Butterworth-Heinemann, Oxford, UK, 2001).
90. J. P. Kalejs, J. Cryst. Growth JCRGAE 0022-0248 230, 10 (2001). 10.1016/S0022-0248(01)01352-5 (Pubitemid 32658081)
91. C. HäΒler, G. Stollwerck, W. Koch, W. Krumbe, A. Müller, D. Franke, and T. Rettelbach, Adv. Mater. ADVMEW 0935-9648 13, 1815 (2001). 10.1002/1521-4095(200112)13:23<1815::AID-ADMA1815>3.0.CO;2-T
92. J. Cochard, S. Gouttebroze, S. Dumoulin, M. Mhamdi, and Z. L. Zhang, 23rd European Photovoltaic Solar Energy Conference (WIP-Munich, Valencia, Spain, 2008).
93. M. Becker and H. Scheel, J. Appl. Phys. JAPIAU 0021-8979 101, 063531 (2007). 10.1063/1.2434961 (Pubitemid 46516993)
94. V. Garcia, Thesis, Georgia Institute of Technology, 2008.
95. H. Behnken, D. Franke, H. Kasjanow, A. Nikanorov, and A. Seidl, Fourth World Conference on Photovoltaic Energy Conversion (IEEE, Waikoloa, Hawaii, 2006), p. 1175.
96. R. C. Hibbeler, Mechanics of Materials, 7th ed. (Prentice-Hall, Upper Saddle River, New Jersey, 2008).
97. A. Argon, Strengthening Mechanisms in Crystal Plasticity (Oxford University Press, USA, 2007). 10.1093/acprof:oso/9780198516002.001.0001
98. R. L. Wallace, J. I. Hanoka, A. Rohatgi, and G. Crotty, Sol. Energy Mater. Sol. Cells SEMCEQ 0927-0248 48, 179 (1997). 10.1016/S0927-0248(97)00101-3
99. K. Scheerschmidt and M. Werner, Phys. Status Solidi A PSSABA 0031-8965 202, 2368 (2005). 10.1002/pssa.200521132 (Pubitemid 41426496)
100. K. Yang, G. H. Schwuttke, and T. F. Ciszek, J. Cryst. Growth JCRGAE 0022-0248 50, 301 (1980). 10.1016/0022-0248(80)90252-3
101. B. L. Sopori and A. Baghdadi, Sol. Cells SOCLD4 0379-6787 1, 237 (1980). 10.1016/0379-6787(80)90070-8
102. J. Chen, T. Sekiguchi, D. Yang, F. Yin, K. Kido, and S. Tsurekawa, J. Appl. Phys. JAPIAU 0021-8979 96, 5490 (2004). 10.1063/1.1797548
103. T. Buonassisi, G. Hahn, A. M. Gabor, J. Schischka, A. A. Istratov, M. D. Pickett, and E. R. Weber, 20th European Photovoltaic Solar Energy Conference and Exhibition (WIP-Munich, Barcelona, Spain, 2005).
104. T. Buonassisi, A. A. Istratov, M. D. Pickett, M. A. Marcus, T. F. Ciszek, and E. R. Weber, Appl. Phys. Lett. APPLAB 0003-6951 89, 042102 (2006). 10.1063/1.2234570 (Pubitemid 44150355)
105. M. Werner, K. Scheerschmidt, E. Pippel, C. Funke, and H. J. Moeller, Carbon in multicrystalline ribbon-silicon for solar cell application (Institute of Physics, Bristol, United Kingdom, 2004), p. 65.
106. H. J. Möller, C. Funke, M. Rinio, and S. Scholz, Thin Solid Films THSFAP 0040-6090 487, 179 (2005). 10.1016/j.tsf.2005.01.061 (Pubitemid 41046320)
107. B. Sopori and W. Chen, J. Cryst. Growth JCRGAE 0022-0248 210, 375 (2000). 10.1016/S0022-0248(99)00714-9 (Pubitemid 30559797)
108. J. Isenberg, J. Dicker, S. Riepe, C. Ballif, S. Peters, H. Lautenschlager, R. Schindler, and W. Warta, 29th IEEE Photovoltaic Specialists Conference (IEEE, Piscataway, NJ, 2002), p. 198.
109. K. Nakayashiki, V. Meemongkolkiat, and A. Rohatgi, IEEE Trans. Electron Devices IETDAI 0018-9383 52, 2243 (2005). 10.1109/TED.2005.856789 (Pubitemid 46446464)
110. V. Kveder, M. Kittler, and W. Schröter, Phys. Rev. B PLRBAQ 0556-2805 63, 115208 (2001). 10.1103/PhysRevB.63.115208
111. D. Macdonald and A. Cuevas, Phys. Rev. B PLRBAQ 0556-2805 67, 075203 (2003). 10.1103/PhysRevB.67.075203
112. C. P. Foy, J. Phys. C JPSOAW 0022-3719 15, 2059 (1982). 10.1088/0022-3719/15/9/025
113. J. Coutinho, O. Andersen, L. Dobaczewski, K. B. Nielsen, A. R. Peaker, R. Jones, S. Oberg, and P. R. Briddon, Phys. Rev. B PLRBAQ 0556-2805 68, 184106 (2003). 10.1103/PhysRevB.68.184106
114. T. S. Fell and P. R. Wilshaw, J. Phys. IV JPICEI 1155-4339 01, C6-211 (1991). 10.1051/jp4:1991632
115. B. L. Sopori, R. W. Gurtler, and I. A. Lesk, Solid-State Electron. SSELA5 0038-1101 23, 139 (1980). 10.1016/0038-1101(80)90150-1
116. C. Donolato, J. Appl. Phys. JAPIAU 0021-8979 84, 2656 (1998). 10.1063/1.368378
117. M. Rinio, S. Peters, M. Werner, A. Lawerenz, and H. -J. Möller, Solid State Phenom. DDBPE8 1012-0394 82-84, 701 (2002). 10.4028/www.scientific. net/SSP.82-84.701
118. N. Usami, R. Yokoyama, I. Takahashi, K. Kutsukake, K. Fujiwara, and K. Nakajima, J. Appl. Phys. JAPIAU 0021-8979 107, 013511 (2010). 10.1063/1.3276219
119. N. Stoddard, R. Sidhu, G. Rozgonyi, I. Witting, and P. V. Dollen, Third International Workshop on Crystalline Silicon Solar Cells (NTNU/SINTEF, Trondheim, Norway, 2009).
120. T. Buonassisi, A. A. Istratov, M. D. Pickett, J. P. Rakotoniaina, O. Breitenstein, M. A. Marcus, S. M. Heald, and E. R. Weber, J. Cryst. Growth JCRGAE 0022-0248 287, 402 (2006). 10.1016/j.jcrysgro.2005.11.053 (Pubitemid 43069664)
121. M. Trushin, W. Seifert, O. Vyvenko, J. Bauer, G. Martinez-Criado, M. Salome, and M. Kittler, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 268, 254 (2010). 10.1016/j.nimb.2009.09.057
122. A. A. Giardini, Am. Mineral. AMMIAY 0003-004X 43, 249 (1958).
123. T. Iwaki and T. Koizumi, Exp. Mech. EXMCAZ 0014-4851 29, 295 (1989). 10.1007/BF02321411
124. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, CA, 1998), p. 529.