Infrared grey-field polariscope: A tool for rapid stress analysis in microelectronic materials and devices

Review of Scientific Instruments

Volumn 76, Issue 4, 2005, Pages

  Horn, Gavin ^a   Lesniak, Jon ^b   MacKin, Thomas ^a   Boyce, Brad ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b Stress Photonics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED GREY-FIELD POLARISCOPE (IR-GFP); INFRARED-TRANSPARENT MATERIALS; MICROELECTRONIC MATERIALS; PHOTOELASTIC THEORY;

PHOTOELASTICITY; POLARISCOPES; SEMICONDUCTOR MATERIALS; SILICON WAFERS; SINGLE CRYSTALS; STRESS ANALYSIS; THICK FILMS; X RAY DIFFRACTION ANALYSIS;

MICROELECTRONICS;

EID: 17644409367     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1884189     Document Type: Article

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