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Volumn 1, Issue , 2006, Pages 1245-1248

Full field stress measurements in thin silicon sheet

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; POLARISCOPES; RESIDUAL STRESSES; STRESS MEASUREMENT; THICKNESS MEASUREMENT;

EID: 41749115479     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCPEC.2006.279425     Document Type: Conference Paper
Times cited : (8)

References (3)
  • 1
    • 1842686234 scopus 로고    scopus 로고
    • Nondestructive measurement of in plane residual stress in thin silicon substrates by infrared transmission
    • Oct
    • T. Zheng and S. Danyluk, "Nondestructive measurement of in plane residual stress in thin silicon substrates by infrared transmission", Matl. Evaluation, vol 50, no 10, Oct 2001, pp1227-1233.
    • (2001) Matl. Evaluation , vol.50 , Issue.10 , pp. 1227-1233
    • Zheng, T.1    Danyluk, S.2
  • 2
    • 0036265210 scopus 로고    scopus 로고
    • Study of stresses in thin silicon wafers with near-infrared phase stepping photoelasticity
    • Jan
    • T. Zheng and S. Danyluk, "Study of stresses in thin silicon wafers with near-infrared phase stepping photoelasticity", J. Mater. Res., vol 17, no. 1, Jan 2002, pp 36-42.
    • (2002) J. Mater. Res , vol.17 , Issue.1 , pp. 36-42
    • Zheng, T.1    Danyluk, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.