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Volumn 1, Issue , 2006, Pages 1245-1248
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Full field stress measurements in thin silicon sheet
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPY;
POLARISCOPES;
RESIDUAL STRESSES;
STRESS MEASUREMENT;
THICKNESS MEASUREMENT;
FULL FIELD STRESS MEASUREMENTS;
IN-PLANE RESIDUAL STRESSES;
MULTICRYSTALLINE SILICON WAFERS;
THIN SILICON SHEET;
SILICON WAFERS;
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EID: 41749115479
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/WCPEC.2006.279425 Document Type: Conference Paper |
Times cited : (8)
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References (3)
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