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Volumn 92, Issue 9, 2008, Pages 1059-1066
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On-wafer investigation of SiC and Si3N4 inclusions in multicrystalline Si grown by directional solidification
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Author keywords
Multicrystalline silicon; Photovoltaic materials; Si3N4 particles; SiC particles; Wire sawing
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Indexed keywords
CRYSTAL GROWTH;
CRYSTALLINE MATERIALS;
INCLUSIONS;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SOLIDIFICATION;
MULTICRYSTALLINE SILICON;
PHOTOVOLTAIC MATERIALS;
SOLIDIFICATION SYSTEMS;
WIRE SAWING;
SILICON CARBIDE;
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EID: 45049083828
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2008.03.007 Document Type: Article |
Times cited : (35)
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References (8)
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