Grain orientation, texture, and internal stress optically evaluated by micro-Raman spectroscopy

Journal of Applied Physics

Volumn 101, Issue 6, 2007, Pages

  Becker, M ^a,b   Scheel, H ^a   Christiansen, S ^b   Strunk, H P ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SILICON WAFERS; SOLAR CELLS; TEXTURES;

GRAIN ORIENTATIONS; MULTICRYSTALLINE SILICON WAFER; POLARIZATION DIRECTION; STRESS TENSOR;

CRYSTALLINE MATERIALS;

EID: 34047174569     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2434961     Document Type: Article

References (26)

1. De Wolf, H. E Maes, and S. K. Jones, J. Appl. Phys. 79, 7148 (1996).
2. I. De Wolf, Semicond. Sci. Technol. 11, 139 (1996).
3. I. De Wolf, J. Raman Spectrosc. 30, 877 (1999).
4. J. Michler Y. V. Kaenel, J. Stiegler, and E. Blank, J. Appl. Phys. 83, 187 (1998).
5. B.Dietrich and K. F.Dombrowski, J. Raman Spectrosc. 30, 893 (1999).
6. E. Bonera, M. Fanciulli, and D. N. Batchelder, Appl. Phys. Lett. 81, 3377 (2002).
7. E. Bonera, M. Fanciulli, and D. N. Batchelder, J. Appl. Phys. 94, 2729 (2003).
8. P. Puech, S. Pinel, R. G. Jasinevicius, and P. S. Pizani, J. Appl. Phys. 88, 4582 (2000).
9. S. Narayanan, S. R. Kalidindi, and L. S. Schadler, J. Appl. Phys. 82, 2595 (1997).
10. G. H. Loechelt, N. G. Cave, and J. Menendez, J. Appl. Phys. 86, 6164 (1999).
11. S. D. Brotherton, J. R. Ayres, M. J. Edwards, C. A. Fisher, C. Glaister, J. P. Gowers, D. J. McCulloch, and M. Trainor, Thin Solid Films 337, 188 (1999).
12. R. Loudon, Adv. Phys. 13, 423 (1964).
13. K. Mizoguchi and S. Nakashima, J. Appl. Phys. 65, 2583 (1989).
14. P. Y. Yu and M. Cardona, Fundamentals of Semiconductors (Springer, Berlin, 1996).
15. S. Ganesan, A. A. Maradudin, and J. Oitmaa, Ann. Phys. 56, 556 (1970).
16. T. Ito, H. Azuma, and S. Noda, Jpn. J. Appl. Phys. 33, 171 (1994).
17. F. Secco D' Aragona, J. Electrochem. Soc. 119, 948 (1972).
18. J. B. Hopkins and L. A. Farrow, J. Appl. Phys. 59, 1103 (1986).
19. J. J. More, B. S. Garbow, and K. E. Hillstrom, User Guide to MINPACK, Argonne National Laboratory Report ANL-80-74 (1980).
20. I. De Wolf, J. Jimenez, J. Landesman, C. Frigeri, P. Braun, E. Da Silva, and E. Calvet, New Developments in Optical Spectroscopy for the Characterization of Semiconductor Devices (Nostradamus) (European Commission, Brussels, 1998).
21. T. L. Anderson, Fracture Mechanics: Fundamentals and Applications (Taylor & Francis, London, 2004).
22. B. Pettinger, B. Ren, G. Picardi, R. Schuster, and G. Ertl, Phys. Rev. Lett. 92, 096101 (2004).
23. W. X. Sun and Z. X. Chen, J. Raman Spectrosc. 34, 668 (2003).
24. E. Anastassakis, A. Cantarero, and M. Cardona, Phys. Rev. B 41, 7529 (1990).
25. W. A. Brantley, J. Appl. Phys. 44, 534 (1973).
26. H. R. Philipp and E. A. Taft, Phys. Rev. 120, 37 (1960).