Resonance ultrasonic vibration diagnostics of elastic stress in full-size silicon wafers

Semiconductor Science and Technology

Volumn 21, Issue 3, 2006, Pages 254-260

  Belyaev, A ^a   Polupan, O ^a   Ostapenko, S ^a   Hess, D ^a   Kalejs, J P ^b  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

^b RWE POWER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; FREQUENCY RESPONSE; PIEZOELECTRIC TRANSDUCERS; RESIDUAL STRESSES; SILICON WAFERS; SOLAR CELLS;

IN-LINE DIAGNOSTICS; RESONANCE ULTRASONIC VIBRATION DIAGNOSTICS; SOLAR CELL MANUFACTURING; VIBRATION MODES;

ULTRASONIC APPLICATIONS;

EID: 32844474385     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/21/3/007     Document Type: Article

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