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Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 859-861

Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer

(6) Kampschulte, Tobias a Schulze, Julian a Gans, Timo a Czarnetzki, Uwe a Marke, Swen b Wallendorf, Till b

a RUHR UNIVERSITY BOCHUM (Germany)

b IfU Diagnostic Systems GmbH (Germany)

Author keywords

Acousto optic tuneable filter (AOTF); Imaging spectroscopy; Inductively coupled plasma (ICP); Phase resolved optical emission spectroscopy (PROES)

Indexed keywords

ACOUSTOOPTICAL DEVICES; EMISSION SPECTROSCOPY; IMAGE QUALITY; IMAGING TECHNIQUES; OPTICAL FILTERS; SPECTROMETERS;

ACOUSTO-OPTIC TUNEABLE FILTER (AOTF); IMAGING SPECTROSCOPY; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY (PROES);

INDUCTIVELY COUPLED PLASMA;

COATING;

EID: 24644517991 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.138 Document Type: Article

Times cited : (9)

References (10)

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