Spatial and phase-resolved optical emission patterns in capacitively coupled radio-frequency plasmas

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 1360-1361

  Nemschokmichal, Sebastian ^a   Dittmann, Kristian ^a   Meichsner, Jürgen ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

Argon; Gas discharges; Hydrogen; Optical spectroscopy; Oxygen; Plasma measurements; Plasma sheaths

Indexed keywords

ARGON; ATOMIC SPECTROSCOPY; EMISSION SPECTROSCOPY; HYDROGEN; INERT GASES; LEAKAGE (FLUID); LIGHT EMISSION; MOLECULAR SPECTROSCOPY; NONMETALS; OXYGEN; PLASMAS;

ARGON ATOMS; CAPACITIVELY COUPLED; EMISSION PATTERNS; EXCITATION MECHANISMS; GAS DISCHARGES; OPTICAL EMISSIONS; OPTICAL SPECTROSCOPY; PLASMA MEASUREMENTS; PLASMA SCIENCE; PLASMA SHEATHS; POW ERFUL TOOL; PROCESS PARAMETERS; RADIO-FREQUENCY; RADIO-FREQUENCY PLASMAS; RF PLASMAS;

OPTICAL EMISSION SPECTROSCOPY;

EID: 50249180135     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.917171     Document Type: Article

References (3)

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3. K. Matyash, R. Schneider, K. Dittmann, J. Meichsner, F. X. Bronold, and D. Tskhakaya, "Radio-frequency discharges in oxygen. III: Comparison of modeling and experiment," J. Phys. D, Appl. Phys., vol. 40, no. 21, pp. 6601-6607, Nov. 2007.