Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge

Journal of Physics D: Applied Physics

Volumn 41, Issue 8, 2008, Pages

  Crintea, D L ^a   Luggenholscher D ^a   Kadetov, V A ^a   Isenberg, Ch ^a   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRONS; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; PHASE MEASUREMENT; PLASMA DENSITY; VELOCITY MEASUREMENT;

ANISOTROPIC ELECTRON VELOCITY DISTRIBUTION;

DISTRIBUTION FUNCTIONS;

EID: 42549118917     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/8/082003     Document Type: Article

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