Radio-frequency discharges in oxygen: II. Spatio-temporally resolved optical emission pattern

Journal of Physics D: Applied Physics

Volumn 40, Issue 21, 2007, Pages 6593-6600

  Dittmann, K ^a   Drozdov, D ^a   Krames, B ^a   Meichsner, J ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS VOLTAGE; CARBON; CCD CAMERAS; ELECTRIC DISCHARGES; NATURAL FREQUENCIES; PLASMA APPLICATIONS;

ATOMIC OXYGEN; ENERGETIC HEAVY PARTICLE LOSS; EXCITATION THRESHOLD ENERGY; TETRAFLUOROMETHANE.;

OXYGEN;

EID: 35549010307     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/21/019     Document Type: Article

References (25)

1. Mutsukura N, Kobayashi K and Machi Y 1989 J. Appl. Phys. 66 4688
2. Mutsukura N, Kobayashi K and Machi Y 1990 J. Appl. Phys. 68 2657
3. Roth R M, Spears K G and Wang G 1984 Appl. Phys. Lett. 45 28
4. van Roosmalen A J, van-den Hoek W G M and Kalter H 1985 J. Appl. Phys. 58 653
5. Chan C, Jin Z-J and Whitaker C 1987 J. Appl. Phys. 62 1633
6. Tochikubo F, Makabe T, Kakuta S and Suzuki A 1992 J. Appl. Phys. 71 2143
7. Mahony C M O, Wazzan R Al and Graham W G 1997 Appl. Phys. Lett. 71 608
8. Mahony C M O and Graham W G 1999 IEEE Trans. Plasma. Sci. 27 72
9. Gans T, Lin C C, Schulz-von der Gathen V and Döbele H F 2001 J. Phys. D: Appl. Phys. 34 L39
10. Gans T, Schulz-von der Gathen V, Czarnetzki U and Döbele H F 2002 Contrib. Plasma Phys. 42 596-602
11. Gans T, Schulz-von der Gathen V and Döbele H F 2004 Contrib. Plasma Phys. 44 523-8
12. Lisovskiy V A and Yegorenkov V D 2006 Vacuum 80 458-67
13. d'Agostino R, Cramarossa F, De Benedictis S and Ferraro G 1980 J. Appl. Phys. 52 1259-65
14. Czarnetzki U, Luggenhölscher D and Döbele H F 1999 Plasma Sources Sci. Technol. 8 230-48
15. Liebermann M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley-Interscience)
16. d'Agostino R, Cramarossa F and De Benedictis S 1982 Plasma Chem. Plasma Process. 2 213
17. Müller U, Bubel T, Schulz G, Sevilla A and Dike J B K 1992 Z. Phys. D: Atoms, Molecules and Clusters 24 131-9
18. Selwyn G S and Kay E 1985 Plasma Chem. Plasma Process. 5 183-99
19. Collart E J H, Baggerman J A G and Visser R J 1991 J. Appl. Phys. 70 5278
20. Geigl M, Peters S, Gabriel O, Krames B and Meichsner J 2005 Contrib. Plasma Phys. 45 369-77
21. Zeuner M, Neumann H and Meichsner J 1997 J. Appl. Phys. 81 2985-94
22. Wild C and Koidl P 1991 J. Appl. Phys. 69 2909-22
23. Katsch H M, Tewes A, Quandt E, Goehlich A, Kawetzki T and Döbele H F 2000 J. Appl. Phys. 88 6232
24. NIST National Institute of Standards and Technologies Atomic Spectra Database (www.nist.gov)
25. Matyash K, Schneider R, Dittmann K, Meichsner J, Bronold F X and Tskhakaya D 2007 Radio-frequency discharges in oxygen: III. Comparison of modelling and experiment J. Phys. D: Appl. Phys. 40 6601 (this issue)