Recent developments in tip-based nanofabrication and its roadmap

Journal of Nanoscience and Nanotechnology

Volumn 8, Issue 5, 2008, Pages 2167-2186

  Tseng, Ampere A ^a   Jou, Shyankay ^b   Notargiacomo, Andrea ^c   Chen, T P ^d  

^a Arizona State University   (United States)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c ROMA TRE UNIVERSITY   (Italy)

^d NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Atomic force microscopy; Dip pen nanolithography; Nanofabrication; Nanolithography; Roadmap; Scanning near field optical microscopy; Tip based

Indexed keywords

(1 1 1) ORIENTATION; ATOMIC FORCE MICROSCOPY (AFM); DIP PEN NANOLITHOGRAPHY (DPN); FUNCTIONALIZED; FUTURE RESEARCH; IN ORDER; MANIPULABILITY; NANO FABRICATION; ROAD MAPS; SCANNING NEAR FIELD OPTICAL MICROSCOPY (SNOM);

ATOMIC FORCE MICROSCOPY; MICROSCOPIC EXAMINATION; NANOLITHOGRAPHY; NANOSTRUCTURES; OPTICAL MICROSCOPY; SCANNING; SCANNING PROBE MICROSCOPY;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

DIMENSIONAL MEASUREMENT; LITHOGRAPHY; MAPPING; MICROSCOPY; OPTICAL MEASUREMENT; SCANNING;

EID: 45849121413     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2008.243     Document Type: Article

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