Recent developments in nanofabrication using scanning near-field optical microscope lithography

Optics and Laser Technology

Volumn 39, Issue 3, 2007, Pages 514-526

  Tseng, Ampere A ^a  

^a AZ 85281   (United States)

Author keywords

Nanofabrication; Nanolithography; Scanning near field optical microscopy

Indexed keywords

LITHOGRAPHY; MATERIALS SCIENCE; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; RELIABILITY;

MATERIAL ADDITION; MATERIAL MODIFICATION; MATERIAL REMOVAL;

NANOTECHNOLOGY;

EID: 33748753954     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2005.11.002     Document Type: Article

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