Piezoelectrics in micro and nanosystems: Solutions for a wide range of applications

Journal of Nanoscience and Nanotechnology

Volumn 8, Issue 5, 2008, Pages 2560-2567

  Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

MEMS or microsystems; Piezoelectric; Thin films; Transducers

Indexed keywords

(PL) PROPERTIES; DEPOSITION PROCESSING; DRIVING FORCES; HIGHER RESOLUTION; PIEZOELECTRIC THIN FILMS; PIEZOELECTRICS; WIDE-RANGE;

CONCENTRATION (PROCESS); FILMS; MATERIALS PROPERTIES; MINIATURE INSTRUMENTS; PIEZOELECTRICITY; SOLIDS; THICK FILMS; THIN FILMS;

VAPOR DEPOSITION;

EID: 45849120636     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2008.634     Document Type: Conference Paper

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