Micromachined infrared detectors based on pyroelectric thin films

Reports on Progress in Physics

Volumn 64, Issue 10, 2001, Pages 1339-1388

  Muralt, P ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTION METHOD; INFRARED RADIATION;

EID: 0034771603     PISSN: 00344885     EISSN: None     Source Type: Journal    
DOI: 10.1088/0034-4885/64/10/203     Document Type: Article

References (131)

1. Effects of titanium buffer layer on PZT crystallization process in sol-gel deposition technique Japan
2. Ferroelectric thin films: Synthesis and basic properties
3. Uncooled infrared sensors: Rapid growth and future perspective
4. Pyroelectric polymer electrets
5. A thin film pyroelectric detector
6. Ferroelectric losses in BaTiO3 produced by the 90° domain walls
7. Thin film pyroelectric imaging array
8. Frontside micromachining using porous silicon sacrificial layer technologies
9. 11 × 16 elementiges Pyrodetektorarray auf der Basis gesputterter selbstpolarisierter PZT Dünnschichten
10. Deposition of self-polarized PZT films by planar multi-target sputtering
11. Historical overview
12. Low cost microbolometer imaging system for dual use
13. Ambient temperature IR focal plane arrays
14. The spontaneous relaxor-ferroelectric transition of PST
15. Uncooled infrared monolithic imaging sensor using pyroelectric polymer
16. A dynamic method for determining the pyroelectric response of thin films
17. PZT thin film actuated elastic fin micromotor
18. Porous silicon bulk micromachining for thermally isolated membrane formation
19. 3 by metallorganic chemical vapor deposition
20. Relative coherency strain and phase transformation history in epitaxial ferroelectric thin films
21. Free-standing films of PST for uncooled infrared detectors
22. Uncooled photoconductive CdHgTe detectors for the 8-14 mm region
23. Observation of a chemical reaction using a micromechanical sensor
24. Intrinsic dielectric loss in crystals
25. Hybrid pyroelectric-ferroelectric holometer arrays
26. Uncooled infrared imaging using thin film ferroelectrics
27. Advances in monolithic ferroelectric uncooled IRFPA technology
28. Thermodynamic theory of the PZT solid solution system
29. Texture, structure and domain microstructure of ferroelectric PZT thin films
30. A high performance amorphous SiC:H thermistor bolometer based on micro-machined structure
31. Sputtering of lead-based ferroelectrics
32. 3 thin films and their crystallographic, dielectric, and pyroelectric properties
33. Theoretical analysis of pulse bias heating of resistance bolometer infrared detectors and effectiveness of bias compensation
34. 3 thin films
35. 3 thin films
36. Processing and properties of thin film pyroelectric devices
37. Poling of ferroelectric films
38. Removal of 90°-domain pinning in (100) PZT15/85 thin films by pulsed operation
39. Poling of pyroelectric thin films
40. Thin film pyroelectric arrays as infra-red detectors
41. Pyroelectric thin film sensor array
42. Pyroelectric thin film sensor array
43. Fabrication of a new pyroelectric infrared sensor using MgO surface micromachining
44. Piezo and pyroelectric properties of lead scandium tantalate thin films
45. The photon detection process
46. A comparison of the limits to the performance of thermal and photon detector imaging arrays
47. Uncooled IR focal plane arrays
48. Pyroelectric imaging
49. Formation kinetics of PZT thin films
50. Absorbing layers for thermal infrared detectors
51. 3 single crystals
52. Application of interferometric enhancement to self-absorbing thin film thermal IR detectors
53. Thin Nickel films as absorbers in pyroelectric sensorarrays
54. Low-temperature preparation of perovskite PST thin films using MOCVD
55. Lower temperature crystallization and ordering in sol-gel derived PST powders and thin layers
56. Evaluation of Curie constants of ferroelectric crystals from pyroelectric response
57. 3 thin films by in situ reactive sputtering on micromachined membranes for micromechanical applications
58. Suspended epitaxial YBaCuO microbolometers fabricated by silicon micromachining: Modelling and measurement
59. Silicon gas flow sensors using industrial CMOS and bipolar IC technology
60. Piezoelectric and pyroelectric microsystems based on ferroelectric thin films
61. PZT thin films for sensors and actuators
62. Piezoelectric thin films for MEMS
63. Ferroelectric thin films for microsensors and actuators: A review
64. 2 seeding
65. 3 PVDFT thin film composites
66. Infrared sensors based on the monolithic structure Si-(VDF/TrFE)
67. An integrated thermopile structure with high responsivity using any standard CMOS process (Transducers'97, Chicago)
68. Reproducibility advances in hybrid uncooled infrared devices II
69. Infrared vision using an uncooled micro-optomechanical camera
70. Domain population in epitaxial ferroelectric thin films: Theoretical calculations and comparison with experiment
71. 3 thin films
72. Thermal simulation of micromachined bridges for integrated pyroelectric sensor arrays
73. Monolithic pyroelectric bolometer arrays
74. Elastic energy release due to domain formation in the strained epitaxy of ferroelectric and ferroelastic thin films
75. A brief guide to pyroelectric detectors
76. Thermal imagers based on HgCdTe LWIR staring focal plane arrays
77. The Pyroelectric detector
78. Intrinsic infrared detectors
79. Equilibrium structure of epitaxial layers
80. Uncooled thin film infrared imaging device with aerogel thermal insulation: Deposition and planarization techniques
81. c superconductor bolometer on a silicon nitride membrane
82. Performance improvement of HgCdTe photo-conductive detectors
83. Thermal properties of silica aerogels between 1.4 and 300 K
84. 2 thin films
85. 3 from solution precursors
86. Study of the transverse piezoelectric coefficient of PZT thin films as a function of texture and composition
87. 3 thin films for pyroelectric devices
88. 3 thin films for pyroelectric applications
89. 3 thin films for pyroelectric applications
90. Microstructural instability of single crystal thin films
91. Integrated thin film PZT pyroelectric detector arrays
92. Lead scandium tantalate for thermal detector applications
93. Pyroelectric properties of a VDF/TrFe on silicon sensors
94. Liquid phase epitaxy of Na-K-Ta-Nb-O for pyroelectric applications
95. Domain configurations due to multiple misfit relaxation mechanisms in epitaxial ferroelectric films III: Intefacial defects and domain misorientations
96. Domain configuration due to multiple misfit relaxation mechanisms in epitaxial ferroelectric films I: Theory
97. Domain configurations due to multiple misfit relaxation mechanisms in epitaxial ferroelectric films II: Experimental verification and implications
98. 3/(001) MgO films
99. Mechanisms of dielectric loss in microwave materials
100. Pyroelectric infrared image sensors operable at room-temperature
101. Pyroelectric vidicon
102. c, YBaCuO supoerconducting transition-edge microbolometers
103. c superconducting thermometer
104. 2 layers as pyroelectric radiation detectors
105. Remote optical detection using microcantilevers
106. Ferroelectric IR bolometers-from hybrid ceramic arrays to direct thin film integration
107. Uncooled IR imaging: Hybrid and integrated bolometer arrays
108. Induced pyroelectricity in sputtered lead scandium tantalate films and their merit for IR detector arrays
109. Pyroelectric devices and materials
110. Thin film pyroelectric array as a detector for an infrared gas spectrometer
111. Gas spectrometry based on pyroelectric thin film arrays integrated on silicon
112. Gas spectrometry based on pyroelectric thin film arrays integrated on silicon
113. High end pyroelectric thin film array detector system
114. Pyroelectric effects in thin film