Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 11, 2006, Pages 2095-2100

  Bjurström, Johan ^a   Wingqvist, Gunilla ^a   Katardjiev, Ilia ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; CRYSTAL RESONATORS; ELECTROMECHANICAL DEVICES; MAGNETRON SPUTTERING; SEMICONDUCTING FILMS; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL);

ANGLE DISTRIBUTION; ELECTROMECHANICAL COUPLING; MICRO FLUIDIC TRANSPORT SYSTEMS; SHEAR MODE RESONATORS;

THIN FILMS;

EID: 33846250326     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.149     Document Type: Article

References (15)

1. K. M. Lakin, G. R. Kline, and K. T. McCarron, "Development of miniature filters for wireless applications," IEEE Trans. Microwave Theory Tech., vol. 43, pp. 2933-2939, 1995.
2. R. Ruby and P. Merchant, "Micromachined thin film bulk acoustic resonators," presented at IEEE Int. Ereq. Contr. Symp., Boston, MA, 1994.
3. M. El Hakiki, O. Elmazria, M. B. Assouar, V. Mortet, L. Le Brizoual, M. Vanecek, and P. Alnot, "ZnO/AlN/diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient," Diamond Related Mater., vol. 14, pp. 1175-1178, 2005.
4. K. M. Lakin, J. S. Wang, G. R. Kline, A. R. Landin, Y. Y. Chen, and J. D. Hunt, "Thin film resonators and filters," presented at IEEE Ultrasonic Symp., San Diego, CA, 1982.
5. S. J. Lasky, H. R. Meyer, and D. A. Buttry, "Quartz microbalance studies of solvent and ion transport in thin polymer films in sensor applications of the QCM," in IEEE Solid-State Sensor Actuator Workshop, Tech. Dig., 1990, pp. 1-4.
6. D. S. Ballantine, "Thickness shear mode resonator," in Acoustic Wave Sensors: Theory, Design, and Physico- Chemical Applications. D. S. Ballantine, R. M. White, S. J. Martin, A. J. Ricco, E. T. Zellers, G. C. Frye, and H. Wohltjen, Eds. San Diego, CA: Academic Press, 1997, p. 44.
7. H. P. Loebl, C. Metzmacher, R. F. Milsom, P. Lok, F. Van Straten, and A. Tuinhout, "RF bulk acoustic wave resonators and filters," J. Electroceram., vol. 12, pp. 109-118, 2004.
8. N. F. Foster, G. A. Coquin, G. A. Rozgonyi, and F. A. Vanatta, "Cadmium sulphide and zinc oxide thin-film transducers," IEEE Trans. Sonics Ultrason., vol. SU-15, pp. 28-41, 1968.
9. J. Bjurström, D. Rosen, I. Katardjiev, V. M. Yanchev, and I. Petrov, "Dependence of the electromechanical coupling on the degree of orientation of c-textured thin A1N films," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, pp. 1347-1353, 2004.
10. M. Minakata, N. Chubachi, and Y. Kikuchi, "Variation of c-axis orientation of ZnO thin films deposited by DC sputtering," Jpn. J. Appl. Phys., vol. 12, pp. 474-475, 1973.
11. S. V. Krishnaswamy, B. R. McAvoy, W. J. Takei, and R. A. Moore, "Oriented ZnO films for microwave shear mode transducers," in Proc. IEEE Ultrason. Symp., 1982, pp. 476-479.
12. J. S. Wang, K. M. Lakin, and A. R. Landin, "Sputtered c-axis inclined piezoelectric films and shear wave resonators," in Proc. IEEE Freq. Contr. Symp., 1983, p. 144.
13. J. Bjurström, L. Vestling, J. Olsson, and I. Katardjiev, "An accurate direct extraction technique for the MBVD resonator model," presented at Eur. Microwave Conf., London, UK, 2004.
14. G. Wingqvist, J. Bjurström, L. Liljeholm, I. Katardjiev, and A. L. Spetz, "Shear Mode A1N Thin Film Electroacoustic Resonator for Biosensor Applications," in Proc. IEEE Sensors, 2005, pp. 492-495.
15. I. Katardjiev, J. Bjurström, and G. Wingqvist, "Production of polycrystalline films for shear mode piezoelectric thin film resonators," International patent application PCT/SE2006/050041, 2006.