Piezoelectric Pb(Zrx, Ti1-x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Journal of Micromechanics and Microengineering

Volumn 14, Issue 12, 2004, Pages 1650-1658

  Ledermann, Nicolas ^a,b   Muralt, Paul ^a   Baborowski, Jacek ^a   Forster, Martin ^c   Pellaux, Jean Paul ^b  

^a EPFL   (Switzerland)

^b Hach Ultra Analytics   (Switzerland)

^c Siemens Schweiz AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; DRY ETCHING; GAS DETECTORS; LEAD COMPOUNDS; MICROMACHINING; PIEZOELECTRIC DEVICES; REACTIVE ION ETCHING; SIGNAL PROCESSING; SILICA; THIN FILMS;

BRIDGE ACOUSTIC SENSORS; PHOTOACOUSTIC GAS DETECTORS; STRESS COMPENSATION;

SENSORS;

EID: 10844256774     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/12/008     Document Type: Article

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