Bulk acoustic wave resonator operating at 8 GHz for gravimetric sensing of organic films

Sensors and Actuators, B: Chemical

Volumn 114, Issue 2, 2006, Pages 681-686

  Rey Mermet, Samuel ^a,b   Lanz, Roman ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

^b Ceramics Laboratory Ecole Polytechnique Federale de Lausanne   (Switzerland)

Author keywords

Aluminium nitride; Bulk acoustic wave resonator; Gravimetric sensor; Organic films; Thin film

Indexed keywords

BULK ACOUSTIC WAVE RESONATOR; GRAVIMETRIC SENSORS; MERCAPTOUNDECANOIC ACID; ORGANIC FILMS;

ACOUSTIC WAVE EFFECTS; ALUMINUM NITRIDE; COMPUTER SIMULATION; GRAVIMETRIC ANALYSIS; MULTILAYERS; SENSITIVITY ANALYSIS; THIN FILMS;

ACOUSTIC RESONATORS;

EID: 33645165395     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.04.047     Document Type: Article

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