Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices

Smart Materials and Structures

Volumn 16, Issue 1, 2007, Pages 128-134

  Meyer, Y ^a   Verdot, T ^a   Collet, M ^a   Baborowski, J ^b   Muralt, P ^b  

^a FEMTO ST INSTITUTE   (France)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODES; ELECTRONIC EQUIPMENT; FREQUENCY STABILITY; PIEZOELECTRIC TRANSDUCERS; SILICON; THIN FILMS;

DYNAMIC EFFECTS; ELECTRONIC CARDS; ELECTRONIC COMPONENTS; MECHANICAL STRUCTURES;

MEMS;

EID: 33947628243     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/16/1/016     Document Type: Article

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