Piezoelectric Thin Films: Evaluation of Electrical and Electromechanical Characteristics for MEMS Devices

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 1, 2007, Pages 8-14

  Prume, Klaus ^a,b,c   Muralt, Paul ^a,c   Calame, Florian ^c   Schmitz Kempen, Thorsten ^b   Tiedke, Stephan ^b  

^a IEEE   (Germany)

^b AIXACCT SYSTEMS GMBH   (Germany)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL POLARIZATION; LASER INTERFEROMETERS; PIEZOELECTRIC THIN FILMS;

INTERFEROMETERS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; POLARIZATION; SPECIFICATIONS;

THIN FILMS;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMICAL MODEL; COMPUTER SIMULATION; ECHOGRAPHY; ELASTICITY; ELECTROCHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; MECHANICAL STRESS; MECHANICS; METHODOLOGY; TRANSDUCER;

COMPUTER SIMULATION; ELASTICITY; ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MECHANICS; MEMBRANES, ARTIFICIAL; MODELS, CHEMICAL; STRESS, MECHANICAL; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 33846280078     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.206     Document Type: Article

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