Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric Lamb wave mode

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 1, 2007, Pages 87-95

  Yantchev, Ventsislav ^a   Katardjiev, Ilia ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; INTEGRATED CIRCUITS; MAGNETRON SPUTTERING; MICROMACHINING; PHOTOLITHOGRAPHY; THIN FILMS;

FILM BULK ACOUSTIC WAVE RESONATOR (FBAR) TECHNOLOGY; FILM PLATE ACOUSTIC RESONATORS (FPAR); PIEZOELECTRIC FILMS; WAVE TRANSDUCERS;

ACOUSTIC RESONATORS;

ACOUSTICS; ARTICLE; ARTIFICIAL MEMBRANE; COMPUTER AIDED DESIGN; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS; METHODOLOGY; MICROELECTRODE; TRANSDUCER; VIBRATION;

ACOUSTICS; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MANUFACTURED MATERIALS; MEMBRANES, ARTIFICIAL; MICROELECTRODES; MINIATURIZATION; TRANSDUCERS; VIBRATION;

EID: 33846273063     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.214     Document Type: Article

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