Active damping of a piezoelectric MEMS acoustic sensor

Integrated Ferroelectrics

Volumn 80, Issue 1, 2006, Pages 317-329

  Wu, Xiaoming ^a   Ren, Tianling ^a   Liu, Litian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; DAMPING; ELECTRIC POTENTIAL; ELECTRIC PROPERTIES; MEASUREMENT THEORY; SENSORS; THIN FILMS;

ACTIVE DAMPING; CLOSED LOOP DAMPING CONTROL; CONTROL CIRCUITS; PIEZOELECTRIC MEMS ACOUSTIC SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 33745737491     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600660108     Document Type: Article

References (9)

1. M. Ahmadian, "An Experimental Evaluation of Smart Damping Materials for Reducing Structural Noise and Vibrations," Journal of Vibration and Acoustics 123, 533-535 (2001).
2. R. M. Lin and K. M. Nyang, "Analytical and Experimental Investigations on Vibration Control Mechanisms for Flexible Active Structures, Smart Structures, Devices, and Systems," Proceedings of SPIE 4935, 244-255 (2002).
3. I. Y. Shen, "Variation Formulation, A Work-Energy Relation and Damping Mechanisms of Active Constrained Layer Treatments," ASME Journal of Vibration and Acoustics 119, 192-199 (1997).
4. M. H. Kiang, O. Solgaard, K. Y. Lau, and R. S. Muller, "Electrostatic Comb Drive-Actuated Micromirrors for Laser-Beam Scanning and Positioning," Journal of Microelectromechanical Systems 7(1), 27-37 (1998).
5. Z. Hao, R. Clark, J. Hammer, M. Whitley, and B. Wingfield, "Modeling Air-Damping Effect In a Bulk Micromachined 2D Tilt Mirror," Sensors and Actuators A, 102, 42-48 (2002).
6. M. Bao, H. Yang, Y. Sun, and Y. Wang, "Squeeze-Film Air Damping of Thick Hole-Plate," Sensors and Actuators 108, 212-217 (2003).
7. E. H. Anderson and N. W. Hagood, "Simultaneous Piezoelectric Sensing/Actuation: Analysis and Application to Controlled Structures," Journal of Sound and Vibration 174(5), 617-639 (1994).
8. J. J. Dosch, D. J. Inman, and E. Garcia, "A Self-Sensing Piezoelectric Actuator for Collocated Control," Journal of Intelligent Materials Systems and Structures 3(1) 166-185 (1992).
9. N. W. Hagood, W. H. Chung, and A. Von Flotow, "Modeling of Piezoelectric Actuator Dynamics for Structural Control," Journal of Intelligent Materials Systems and Structures 1(3), 327-354 (1990).