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Sensors and Actuators, A: Physical

Volumn 91, Issue 3, 2001, Pages 313-320

Surface micromachined piezoelectric resonant beam filters

(5) Piekarski, Brett a,b DeVoe, Don b Dubey, Madan a Kaul, Roger a Conrad, John a

a U S ARMY RESEARCH LABORATORY (United States)

b UNIVERSITY OF MARYLAND (United States)

Author keywords

Lead zirconate titanate; MEMS filters; MEMS resonators; PZT; RF MEMS

Indexed keywords

CRYSTAL FILTERS; CRYSTAL RESONATORS; ELECTRODES; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE EFFECTS; SILICA; THERMAL EFFECTS; TUNING; ACTUATORS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; PLATINUM; SOL-GELS;

LEAD ZIRCONATE TITANATE; PIEZOELECTRIC POLING; PIEZOELECTRIC RESONANT BEAM FILTERS; MICROELECTROMECHANICAL SYSTEM FILTERS; MICROELECTROMECHANICAL SYSTEM RESONATORS; PIEZOELECTRIC ACTUATOR;

MICROELECTROMECHANICAL DEVICES; RESONATORS;

EID: 0035880213 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00601-X Document Type: Article

Times cited : (74)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.