Vibration of micromachined circular piezoelectric diaphragms

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 4, 2006, Pages 697-705

  Hong, Eunki ^a,b   Trolier McKinstry, Susan ^a,b,d,e,f   Smith, Robert ^a,c,g   Krishnaswamy, Silai V ^a,b,c   Freidhoff, Carl B ^{a,c,f,h,i,j,k,l}  

^a IEEE   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c NORTHROP GRUMMAN CORPORATION   (United States)

^d IEEE UFFC ^*

^e AMERICAN CERAMIC SOCIETY   (United States)

^f Materials Research Society   (United States)

^g NGC   (United Kingdom)

^h Chemical and Biological Defense Technology Center   (United States)

ⁱ American Society of Mass Spectrometry   (United States)

^j American Vacum Society   (United States)

^k International Society for Optical Engineering

^l National Defence Industrial Association

more..

Author keywords

[No Author keywords available]

Indexed keywords

CIRCULAR PIEZOELECTRIC DIAPHRAGMS; MEMBRANE TENSION; NONLINEAR VIBRATION; RING-SHAPED INTERDIGITATED (IDT) ELECTRODES; ELECTRICAL EXCITATION; GEOMETRIC NON-LINEARITY; INTERDIGITATED ELECTRODES; MATERIAL NON-LINEARITY; NON-LINEAR VIBRATIONS; PIEZOELECTRIC DIAPHRAGMS; RESONANCE FREQUENCIES; THEORETICAL VALUES;

CONTROL NONLINEARITIES; ELECTRIC EXCITATION; EPITAXIAL GROWTH; MEMBRANES; PIEZOELECTRIC DEVICES; SILICON COMPOUNDS; THIN FILMS; ELECTRODES; LEAD; PIEZOELECTRICITY; SILICON OXIDES;

DIAPHRAGMS;

EID: 33645671122     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1611029     Document Type: Article

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