Silicon micromachined ultrasonic immersion transducers

Applied Physics Letters

Volumn 69, Issue 24, 1996, Pages 3674-3676

  Soh, H T ^a   Ladabaum, I ^a   Atalar, A ^a,b   Quate, C F ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001600042     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117185     Document Type: Article

References (9)

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4. J. H. Cantrell and J. S. Heyman, Rev. Sci. Instrum. 50, 31 (1979).
5. D. W. Schindel and D. A. Hutchins, Proceedings of the 1991 Ultrasonics Symposium, 301 (1991).
6. I. Ladabaum, D. Spoliansky, and B. T. Khuri-Yakub, Appl. Phys. Lett. 68, 7 (1996).
7. M. I. Haller, Ph.D. thesis, Stanford University, 1994.
8. T. B. Gabrielson, IEEE Trans. Electron Devices 40, 903 (1993).
9. H. B. Callen and T. A. Welton, Phys. Rev. 83, 34 (1951).