Fabrication and characterization of micromachined accelerometers based on PZT thin films

Ferroelectrics

Volumn 224, Issue 1-4, 1999, Pages 283-290

  Baborowski, J ^a   Hediger, S ^a   Muralt, P ^a   Wuethrich, Ch ^b  

^a EPFL   (Switzerland)

^b ASULAB   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; FABRICATION; FREQUENCY RESPONSE; LEAD COMPOUNDS; MICROMACHINING; PIEZOELECTRICITY; VIBRATION MEASUREMENT;

BOSS LOADED CANTILEVER STRUCTURE; LEAD ZIRCONATE TITANATE; MICROMACHINED ACCELEROMETERS;

THIN FILMS;

EID: 0033086697     PISSN: 00150193     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/00150199908210578     Document Type: Article

References (6)

1. J.W. Waanders, Piezoelectric Ceramics, Phillips Components, 1991.
2. M. Sakata et al., Microsystem Technologies, 2, 26-31 (1995).
3. C. Lee, et al., International Electron Devices Meeting, IEDM technical digest, 545-548 (1996).
4. D.I. Polla, in Science and Technology of Electroceramic Thin Films, Ed. Orlando Auciello, 413-426 (1995).
5. P. Muralt, et al., Sensors and Actuators A, 53, 397-403 (1996).
6. P. Muralt, et al., Sensors and Actuators A, 48, 157-165 (1995).