Design of a novel thin-film piezoelectric accelerometer

Sensors and Actuators, A: Physical

Volumn 56, Issue 3, 1996, Pages 239-249

  Nemirovsky, Y ^a,b   Nemirovsky, A ^a,c   Muralt, P ^a   Setter, N ^a  

^a MX D Ecublens   (Switzerland)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^c NONE   (Israel)

Author keywords

Accelerometers; Piezoelectricity; Thin films

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; DAMPING; ELECTRIC FIELDS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; POLYMERS; PYROELECTRICITY; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS; THIN FILM DEVICES;

CHARGE SENSITIVE PREAMPLIFIER; SEISMIC MASS; SENSOR SENSITIVITY; SILICON CHIP;

ACCELEROMETERS;

EID: 0030233239     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01324-6     Document Type: Article

References (28)

1. L. Ristic, Sensor Technology and Devices, Artech House, Boston, 1994, pp. 377-455.
2. M.E. Motamedi and R.M. White, Acoustic sensors, in S.M. Sze (ed.), Semiconductor Sensors, Wiley, New York, 1994, pp. 97-151.
3. B. Kloeck and N.F. de Rooij, Mechanical sensors, in S.M. Sze (ed.), Semiconductor Sensors, Wiley, New York, 1994, pp. 153-204.
4. J.W. Waanders, Piezoelectric Ceramics, Philips Components, Eindhoven, 1991.
5. A.J. Moulson and J.M. Herbert, Electroceramics, Chapman and Hall, New York, 1992, pp. 265-347.
6. B. Jaffe, W.R. Cook and H. Jaffe, Piezoelectric Ceramics, Academic Press, New York, 1971.
7. O. Auciello, K.D. Gifford, D.J. Lichtenwalner, R. Dat, H. Al-Shareef, K.R. Bellur and A.I. Kongon, A review of composition-structure-property relationship for PZT-based heterostructure capacitors, Proc. 6th ISIF Conf., 1994, Integrated Ferroelectrics, 6 (1995) 173-187.
8. R. Bruchhaus, H. Huber, D. Pitzer and W. Wersing, Ferroelectric PZT thin films prepared by planar multitarget sputtering, Integrated Ferroelectrics, 2 (1992) 157-164.
9. C.-C. Hsueh, T. Tamagawa, C. Ye, A. Helgeson and D.L. Polla, Solgel derived ferroelectric thin films in silicon micromachining, Integrated Ferroelectrics, 3 (1993) 21-32.
10. Jie-Fang Li, D.D. Viehland, T. Tani, C.D.E. Lakeman and D.A. Payne, Piezoelectric properties of sol-gel derived ferroelectric and antiferroelectric thin layers, J. Appl. Phys., 75 (1994) 442-448.
11. 2 Si substrates using bismuth titanate template layer, Appl. Phys. Lett., 64 (1994) 2511-2513,
12. K.G. Brooks, I.A. Reaney, R. Klissurska, Y. Huang, L. Bursill and N. Setter, Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates, J. Mater. Res., 9 (1994) 2540-2553.
13. I.M. Reaney, K.G. Brooks, R. Klissurska, Cz. Pawlaczyk and N. Setter, Use of transmission electron microscopy for the characterization of rapid thermally annealed sol-gel PZT films, J. Am. Ceram. Soc., 77 (1994) 1209-1240.
14. P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. Brooks, N. Setter and R. Luthier, Fabrication and characterization of PZT thin film vibrators for micromotors, Sensors and Actuators A, 48 (1995) 157-165.
15. J. Brandrup and E.H. Immergut (eds.), Polymer Handbook, Wiley, New York, 3rd edn., 1989.
16. R.J. Young and P.A. Lovell, Introduction to Polymers, Chapman and Hall, New York, 2nd edn., 1994.
17. F.R. Blom, S. Bouwstra, M. Elwenspoek and J.H. Fluitman, Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry, J. Vac. Sci. Technol. B, 10 (1992) 19-26.
18. M. Andrews, I. Harris and G. Turner, A comparison of squeeze-film theory with measurements on a microstructure, Sensors and Actuators A, 36 (1993) 79-87.
19. K. Minami, T. Moriuchi and M. Esashi, Cavity pressure control for critical damping of packaged micro mechanical devices, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators/Eurosensors IX, Stockholm, Sweden, 25-29 June, 1995, pp. 240-243.
20. Amptek Inc., 6 De Angelo Drive, Bedford, MA 01730, USA, Data Sheets of charge sensitive preamplifier A250.
21. C. Jakobson, A low noise CMOS switched charge sensitive preamplifier, M.Sc. Thesis, Technion-Israel Institute of Technology, 1995.
22. 3 thin films of different textures on Pt Ti electrodes, Proc. 1st Eur. Conf. Integrated Ferroelectrics, Nijemegen, Netherlands, 3-5 July, 1995, Microelectronics Eng., 29 (1995) 293-296.
23. K.G. Brooks, D. Damjanovic, A. Kholkin, I. Reaney, N. Setter, P. Luginbuhl, G.A. Racine and N.F. de Rooij, PZT films for micropumps, Integrated Ferroelectrics, 8 (1995) 13-23.
24. D. Damjanovic, K.G. Brooks, A. Kholkin, T. Maeder, P. Muralt and N. Setter, Properties of piezoelectric PZT thin films for microactuator applications, Mater. Res. Soc. Symp. Proc., 360 (1995).
25. P. Muralt, M. Kohli, T. Maeder, K.G. Brooks, A.Kholkin, R. Luthier and N. Setter, Characterization of PZT films for micromotors, Proc. 1st Eur. Conf. Integrated Ferroelectrics, Nijemegen, Netherlands, 3-5 July, 1995, Microelectronics Eng., 29(1995) 67-70.
26. P. Muralt, A. Kholkin, M. Kohli, T. Maeder, K.G. Brooks, R. Luthier and N. Setter, Fabrication and characterization of PZT thin films for micromotors, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators/Eurosensors IX, Stockholm, Sweden, 25-29 June, 1995, pp. 397-400.
27. A.K. Tagantsev, A.L. Kholkin, E.L. Colla, K.G. Brooks and N. Setter, Effect of ferroelectric polarization on current response of PZT films, Proc. 7th Int. Conf. Integrated Ferroelectrics (Colorado Springs, CO, USA, 20-22 March, 1995, Integrated Ferroelectrics, 10 (1995) 189-204.
28. D. Royer and V. Kimetik, Measurement of piezoelectric constants using an optical heterodyne interferometer, Electron. Lett., 28 (1992) 1829-1830.