Computer simulation of magnetron sputtering - Experience from the industry

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 895-903

  Kadlec, S ^a  

^a Staccato Consulting   (Czech Republic)

Author keywords

Computer simulation; Magnetron sputtering; Monte Carlo; Plasma

Indexed keywords

COMPUTER SIMULATION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRONS; MAGNETIC FIELD EFFECTS; MONTE CARLO METHODS; PLASMAS; REACTIVE SPUTTERING;

ENERGETIC ELECTRON; MAGNETIC FIELD PATTERN; MAGNETRON PLASMA;

MAGNETRON SPUTTERING;

COMPUTER SIMULATION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRONS; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MONTE CARLO METHODS; PLASMAS; REACTIVE SPUTTERING;

EID: 36048982214     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.06.043     Document Type: Article

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