Modelling of magnetron sputtering process

Czechoslovak Journal of Physics

Volumn 54, Issue SUPPL. 3, 2004, Pages

  Kubart, T ^a   Novak R ^a   Valter, J ^b  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^b HVM Plasma Ltd   (Czech Republic)

Author keywords

Magnetron sputtering; Plasma modelling

Indexed keywords

EID: 33747883443     PISSN: 00114626     EISSN: 15729486     Source Type: Journal    
DOI: 10.1007/BF03166526     Document Type: Article

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