An analysis of the role of high energy neutral bombardment in longthrow/collimated sputtering of refractory metal barrier layers

Journal of Applied Physics

Volumn 84, Issue 9, 1998, Pages 5315-5325

  Smy, T ^a   Joshi, R V ^b   Tait, N ^a   Dew, S K ^c   Brett, M J ^c  

^a CARLETON UNIVERSITY   (Canada)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001664764     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368780     Document Type: Article

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