Modeling of gas discharge plasmas: What can we learn from it?

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 62-67

  Bogaerts, Annemie ^a   De Bleecker, Kathleen ^a   Kolev, Ivan ^a   Madani, Myriam ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Fluid model; Gas discharge; Modeling; PIC MC model; Plasma

Indexed keywords

COMPUTER SIMULATION; ELECTRIC DISCHARGES; MATHEMATICAL MODELS; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; SURFACE TREATMENT;

FLUID MODEL; GAS DISCHARGE PLASMAS; PARTICLE-IN-CELL MONTE CARLO MODELS;

PLASMAS;

PLASMA TREATMENT;

EID: 24644493313     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.057     Document Type: Article

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